Publication costs assisted by the U. S. Energy Research and Development AdminlstrationRate constants for the reactions of H atoms, formed by mercury photosensitization of H2-substrate mixtures at 32 O C , with (CH3),SiH4-, and (C2HS),SiH4-, for n = 0, 1,2,3; with (CH3),SiD4-, for n = 0, 1; and with Si2H6, Si2D6, GeH4, and Ge2H6 have been determined in experiments involving the competitive reaction of H atoms with C2H4 and i-C4HB. Activation energies, estimated from these rate constants, have been combined with thermochemical data by means of a bond-energy-bond-order (BEBO) method of calculation to yield a consistent set of dissociation energies for Si-H bonds in the R,SiH4-, series of silanes for n = 0, 1, 2, 3.