Document VersionPublisher's PDF, also known as Version of Record (includes final page, issue and volume numbers)Please check the document version of this publication:• A submitted manuscript is the author's version of the article upon submission and before peer-review. There can be important differences between the submitted version and the official published version of record. People interested in the research are advised to contact the author for the final version of the publication, or visit the DOI to the publisher's website.• The final author version and the galley proof are versions of the publication after peer review.• The final published version features the final layout of the paper including the volume, issue and page numbers.
Link to publication
General rightsCopyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.• Users may download and print one copy of any publication from the public portal for the purpose of private study or research.• You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal ?
Take down policyIf you believe that this document breaches copyright please contact us providing details, and we will remove access to the work immediately and investigate your claim. We report in this work the optical properties of Er 3+ -doped Y 2 O 3 , deposited by radical enhanced atomic layer deposition. Specifically, the 1.53 m absorption cross section of Er 3+ in Y 2 O 3 was measured by cavity ring-down spectroscopy to be ͑1.9± 0.5͒ ϫ 10 −20 cm 2 , about two times that for Er 3+ in SiO 2 . This is consistent with the larger Er 3+ effective absorption cross section at 488 nm, determined based on the 1.53 m photoluminescence yield as a function of the pump power. X-ray photoelectron spectroscopy and Rutherford backscattering spectroscopy were used to determine the film composition, which in turn was used to analyze the extended x-ray absorption fine structure data, showing that Er was locally coordinated to only O in the first shell and its second shell was a mixture of Y and Er. These results demonstrated that the optical properties of Er 3+ -doped Y 2 O 3 are enhanced, likely due to the fully oxygen coordinated, spatially controlled, and uniformly distributed Er 3+ dopants in the host. These findings are likely universal in rare-earth doped oxide materials, making it possible to design materials with improved optical properties for their use in optoelectronic devices.