Absolute three-dimensional coordinate measurement by the two-point diffraction interferometry

Rhee, Hyug-Gyo; Chu, Jiyoung; Lee, Yun-Woo

doi:10.1364/oe.15.004435

Cited by 17 publications

(8 citation statements)

References 19 publications

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“…The PDI technology has been applied to achieve surface metrology [9,10], high-precision measurement of 3D absolute displacement [2,[11][12][13] and diffraction wavefront error [7], etc. In the fiber PDI system, two fibers are integrated in measuring probe, and the diffraction spherical wavefronts generated from fiber sources interfere with each other.…”

Section: Introductionmentioning

confidence: 99%

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Probe misalignment calibration in fiber point-diffraction interferometer

et al. 2019

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The measuring probe integrated with multiple fiber point-diffraction sources can be applied to measure both the three-dimensional coordinates and highly accurate point-diffraction wavefront. The probe determines the achievable measurement accuracy of fiber point-diffraction interferometer (PDI), in which the fiber exit end plane is required to be parallel with the detector plane. The probe misalignment due to fabrication error could introduce significant measurement error. A high-precision method is proposed to calibrate the probe misalignment in fiber PDI, including the central positioning based on phase difference and tilt adjustment based on Zernike polynomials fitting. Both numerical simulation and experiments have been carried out to demonstrate the feasibility and accuracy of the proposed probe misalignment calibration method. The proposed method provides a feasible way to address the processing uncertainty on measuring probe in fiber PDI, and enables high-precision geometry alignment and misalignment calibration in the interferometric testing systems with case of no imaging lens.

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Section: Introductionmentioning

confidence: 99%

“…Some conclusions are drawn in Section 4. Figure 1 shows the basic schematic diagram of fiber PDI system, which can be applied to measure both the 3D absolute displacement [11][12][13] and point-diffraction wavefront [7]. According to Fig.…”

Section: Introductionmentioning

confidence: 99%

Probe misalignment calibration in fiber point-diffraction interferometer

et al. 2019

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“…Besides, the achievable accuracy of the existing measurement technique is limited by the machining error of standard parts in the system. The method based on point-diffraction interferometer (PDI) [3][4][5][6][7] provides a feasible way for the in-situ high-precision measurement of three-dimensional absolute displacement, in which two optical fibers are applied to generate the lateral shearing spherical wavefronts. The point-diffraction spherical wavefronts from two fibers, which are installed on the target to be measured, interfere with each other, and the absolute displacement of the target can be retrieved from the interference field.…”

Section: Introductionmentioning

confidence: 99%

Fast searching measurement of absolute displacement based on submicron-aperture fiber point-diffraction interferometer

Wang

Liang

et al. 2017

SPIE Proceedings

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The submicron-aperture fiber point-diffraction interferometer (SFPDI) can be applied to realize the measurement of three-dimensional absolute displacement within large range, in which the performance of point-diffraction wavefront and numerical iterative algorithm for displacement reconstruction determines the achievable measurement accuracy, reliability and efficiency of the system. A method based on fast searching particle swarm optimization (FS-PSO) algorithm is proposed to realize the rapid measurement of three-dimensional absolute displacement. Based on the SFPDI with two submicron-aperture fiber pairs, FS-PSO method and the corresponding model of the SFPDI, the measurement accuracy, reliability and efficiency of the SFPDI system are significantly improved, making it more feasible for practical application. The effect of point-diffraction wavefront error on the measurement is analyzed. The error of pointdiffraction wavefront obtained in the experiment is in the order of 1×10 -4 λ (the wavelength λ is 532 nm), and the corresponding displacement measurement error is smaller than 0.03 μm. Both the numerical simulation and comparison experiments have been carried out to demonstrate the accuracy and feasibility of the proposed SFPDI system, high measurement accuracy in the order of 0.1 μm, convergence rate (~90.0%) and efficiency have been realized with the proposed method, providing a feasible way to measure three-dimensional absolute displacement in the case of no guide rail.

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“…In our research, both numerical analysis and experimental measurement have been performed to reconstruct the point-diffraction wavefront aberration. Besides, various setups of PDI have been developed to realize the precise surface testing with adjustable contrast [12,22] and three-dimensional (3D) coordinate measurement [20,23,24]. The new PDI for three-dimensional (3D) coordinate measurement avoids the measurement uncertainty introduced by the imperfect target in multilateration and allows the target (made of two point-diffraction sources) to take free movement within a volumetric space over NA of point-diffraction wave.…”

Section: Introductionmentioning

confidence: 99%

Point Diffraction Interferometry

Wang¹,

Liang²

2017

Optical Interferometry

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The point diffraction interferometer (PDI) employs a point-diffraction spherical wavefront as ideal measurement reference, and it overcomes the accuracy limitation of reference optics in traditional interferometers. To overcome the limitation of measurement range either with pinhole (low light transmission) or with single-mode fiber (low NA), a single-mode fiber with narrowed exit aperture has been proposed to obtain the point-diffraction wavefront with both high NA and high power. It is a key issue to analyze the point-diffraction wavefront error in PDI, which determines the achievable accuracy of the system. The FDTD method based on the vector diffraction theory provides a powerful tool for the design and optimization of the PDI system. In addition, a high-precision method based on shearing interferometry can be applied to measure point-diffraction wavefront with high NA, in which a double-step calibration including three-dimensional coordinate reconstruction and symmetric lateral displacement compensation is used to calibrate the geometric aberration. The PDI is expected to be a powerful tool for high-precision optical testing. With the PDI method, a high accuracy with RMS value better than subnanometer can be obtained in the optical surface testing and submicron in the absolute three-dimensional coordinate measurement, demonstrating the feasibility and wide application foreground of PDI.

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Absolute three-dimensional coordinate measurement by the two-point diffraction interferometry

Cited by 17 publications

References 19 publications

Probe misalignment calibration in fiber point-diffraction interferometer

Probe misalignment calibration in fiber point-diffraction interferometer

Fast searching measurement of absolute displacement based on submicron-aperture fiber point-diffraction interferometer

Point Diffraction Interferometry

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