2010 17th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits 2010
DOI: 10.1109/ipfa.2010.5532244
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Absorbed-specimen current imaging implementation and characterization in nano-prober for resistive interconnects isolation in 45-nm silicon-on-insulator microprocessors

Chen Yaliang
1
,
Lim Soon-Huat
2
,
Vinod Narang
3
et al.
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