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IntroductionDue to its specific electrical and optical properties (high electrical conductivity and high optical transparency in the visible domain), zinc oxide (ZnO) is a suitable material with applications in a large number of devices and components such as optical waveguides, piezoelectric transducers, transparent conductive electrodes, gas sensors, light emitting diodes, and others [1][2][3][4][5][6]. Moreover, because it is abundant and environmentally friendly, ZnO is an ideal wide bandgap material for applications in photovoltaics (PV). The ability to easily tune the conductivity, charge carrier concentration, and optical properties of ZnO films is highly desirable for these applications. Doping by well-suited elements is a way to modify or enhance physical properties or to induce new ones in oxide films [5][6][7][8][9]. In this frame, the best doping of ZnO thin films for both electrical conductivity and optical transparency comparable with those of the indium-tin oxide (
AbstractTransparent Nd-doped ZnO films with thickness in the range of 70 to 250 nm were grown by pulsed-laser deposition (PLD) on c-cut sapphire substrates at various oxygen pressures and substrate temperatures. A wide range of optical and electrical properties of the films were obtained and correlated to the composition and crystalline structure. The Nd-doped ZnO films are smooth, dense, and display the wurtzite phase. Different epitaxial relationships between films and substrate as a function of growth pressure and substrate temperature were evidenced by asymmetric x-ray diffraction measurements. By varying PLD growth conditions, the films can be tuned to have either metallic or semiconductor characteristics, with good optical transmittance in the visible range. Moreover, a low-temperature metal-insulator transition may be observed in Nd-doped ZnO films grown under low oxygen pressure. Resistivities as low as 6 × 10 −4 Ω cm and 90% optical transmittance in the visible range and different nearinfrared transmittance are obtained with approximately 1.0-1.5 at.% Nd doping and growth temperature of approximately 500 °C.