“…Samples of two types, i.e. so-called "black" and "white" porous layers, were obtained by metalassisted chemical etching (MACE), which is a "top-down" approach of material processing by dissolution catalyzed with noble metal nanoparticles [6][7][8][9]. As a substrate we used (100) oriented p-Image Processing and Earth Remote Sensing Z Zh Zhanabaev, T Yu Grevtseva, K A Gonchar, G K Mussabek, D Yermukhamed, A A Serikbayev, R B Assilbayeva, A Zh Turmukhambetov and V Yu Timoshenko type c-Si wafers with resistivity of 1-10 Ω*cm and the treatment was carried out in three stages: 1) deposition of catalyst metal particles on the substrate surface, 2) chemical etching of the substrate and 3) removal of residual metal particles.…”