AC Voltage Reference Based on a Capacitive Micromechanical Component

Kärkkäinen, Anu; Pesonen, Nadine; Suhonen, Mika; Kyynäräinen, Jukka; Oja, Aarne; Manninen, A. J.; Tisnek, N.I.; Seppä, Heikki

doi:10.1109/cpem.2004.305489

Cited by 12 publications

(5 citation statements)

References 2 publications

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“…After Suhonen, many other researchers started to work on these voltage reference sources to improve their accuracy. Since the fabrication characteristics of MEMS tunable capacitor as the main element of MEMS-based voltage references are very critical, there are several papers which are focused on micromachining process of the MEMS tunable capacitors [2][3][4][5][6][7]. The main purpose of these works is to propose and fabricate new designs of microsized tunable capacitors and show the improvement of obtained MEMS-based voltage references.…”

Section: Introductionmentioning

confidence: 99%

Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

Ranjbar

Mehrnezhad

Suratgar

2017

Journal of Control Science and Engineering

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The accuracy of physical parameters of a tunable MEMS capacitor, as the major part of MEMS AC voltage reference, is of great importance to achieve an accurate output voltage free of the malfunctioning noise and disturbance. Even though strenuous endeavors are made to fabricate MEMS tunable capacitors with desiderated accurate physical characteristics and ameliorate exactness of physical parameters' values, parametric uncertainties ineluctably emerge in fabrication process attributable to imperfections in micromachining process. First off, this paper considers applying an adaptive sliding mode controller design in the MEMS AC voltage reference source so that it is capable of giving off a well-regulated output voltage in defiance of jumbling parametric uncertainties in the plant dynamics and also aggravating external disturbance imposed on the system. Secondly, it puts an investigatory comparison with the designed model reference adaptive controller and the pole-placement state feedback one into one's prospective. Not only does the tuned adaptive sliding mode controller show remarkable robustness against slow parameter variation and external disturbance being compared to the pole-placement state feedback one, but also it immensely gets robust against the external disturbance in comparison with the conventional adaptive controller. The simulation results are promising.

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Section: Introductionmentioning

confidence: 99%

Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

Ranjbar

Mehrnezhad

Suratgar

2017

Journal of Control Science and Engineering

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“…The instrumentation amplifier IA1 isolates the AC source. The stability of the OA 2 gain is recorded at the output of the unity gain buffer amplifier OA 3 [3].…”

Section: Using Mems Devices In a Micro Electronic Circuit As Ac Voltamentioning

confidence: 99%

Noise effect reduction on a MEMS-based AC voltage reference source using Artificial Neural Network

Suratgar

Hashemipoor

Hoseini

2009

2009 2nd IEEE International Conference on Computer Science and Information Technology

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This paper presents a new method in order to reduce noise effect in an AC voltage reference source. The AC voltage reference source is implemented on MEMS technology. It uses capacitive MEMS technology. The reference is based on the characteristic AC current-voltage curve MEMS component. The multilayer neural network is used. The neural network (NN) uses the Levenberg-Marquardt (LM) method for training. The noise effect on an electronic circuit is investigated. The simulation results are very promising. Keywords: AC voltage reference source noise effect reduction, MEMS, Neural Network RESUMENEl presente trabajo presenta un método nuevo para reducir el efecto de ruido en una referencia de fuente de voltaje de AC. La referencia de fuente de voltaje se implementa mediante tecnología MEMS; emplea tecnología capacitiva MEMS. La referencia se basa en la curva de corriente-voltaje de CA característica del componente MEMS. Se utiliza la red neuronal multicapas. La red neuronal (RN) usa el método Levenberg-Marquardt (LM) con fines de experimentación. Asimismo se investiga el efecto de ruido en un circuito electrónico. Los resultados de simulación son muy prometedores.

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“…They have chiefly proposed an innovative design of micro tunable capacitors and have endeavoured to define the properties of MEMS VRS. Kärkkäinen et al [23] presented design and characterization of a high stability capacitive MEMS device intended for an AC voltage reference at 100 kHz or higher frequencies. A novel fabrication process was proposed to metallize both surfaces of an electrostatically actuated micro-machined moving plate capacitor to be utilized as an AC voltage reference for electrical metrology purposes.…”

Section: Introductionmentioning

confidence: 99%

Design of a fuzzy PID controller for a MEMS tunable capacitor for noise reduction in a voltage reference source

et al. 2021

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This study presents a conventional Ziegler-Nichols (ZN) Proportional Integral Derivative (PID) controller, having reviewed the mathematical modeling of the Micro Electro Mechanical Systems (MEMS) Tunable Capacitors (TCs), and also proposes a fuzzy PID controller which demonstrates a better tracking performance in the presence of measurement noise, in comparison with conventional ZN-based PID controllers. Referring to importance and impact of this research, the proposed controller takes advantage of fuzzy control properties such as robustness against noise. TCs are responsible for regulating the reference voltage when integrated into Alternating Current (AC) Voltage Reference Sources (VRS). Capacitance regulation for tunable capacitors in VRS is carried out by modulating the distance of a movable plate. A successful modulation depends on maintaining the stability around the pull-in point. This distance regulation can be achieved by the proposed controller which guarantees the tracking performance of the movable plate in moving towards the pull-in point, and remaining in this critical position. The simulation results of the tracking performance and capacitance tuning are very promising, subjected to measurement noise. Article Highlights This article deals with MEMS tunable capacitor dynamics and modeling, considering measurement noise. It designs and applies fuzzy PID control system for regulating MEMS voltage reference output. This paper contributes to robustness increase in pull-in performance of the tunable capacitor.

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AC Voltage Reference Based on a Capacitive Micromechanical Component

Cited by 12 publications

References 2 publications

Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source

Noise effect reduction on a MEMS-based AC voltage reference source using Artificial Neural Network

Design of a fuzzy PID controller for a MEMS tunable capacitor for noise reduction in a voltage reference source

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