Acceleration and Vibration Sensitivity of SAW Devices

Sinha, Bikash K.; Locke, S.

doi:10.1109/t-uffc.1987.26908

Cited by 39 publications

(9 citation statements)

References 17 publications

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“…It should be noted that the have lower symmetry than . The solution for surface waves propagating in arbitrarily anisotropic, piezoelectric substrates and satisfying the wave equations and boundary conditions, may be written as exp exp exp exp (6) where are the complex representation of the real mechanical displacement and electric potential for propagation in the natural direction with normal to the surface plane. The perturbation method [8] is used to solve (1)-(2) and leads to the first-order relative velocity change (7) where is the solution of the unperturbed surface wave with the velocity and the angular frequency .…”

Section: Saw Propagation In a Prestrained Mediummentioning

confidence: 99%

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Pressure-sensitive cuts for surface acoustic waves in /spl alpha/-quartz

Taziev

Kolosovsky

Kozlov

1995

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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The influence of external static forces on SAW velocity is computed for the case of circular plates (membranes). The pressure sensitivity of the SAW velocity as a function of -quartz crystal anisotropy is presented by sensitivity contour mapping for two independent variables: direction of SAW propagation and cut angles of the -quartz substrate. The theoretical sensitivity values are compared with experimental results for the case of circular plates. Both experimental and theoretical results are in good agreement.

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Section: Saw Propagation In a Prestrained Mediummentioning

confidence: 99%

“…Recently, in order to explain some discrepancies between theoretical and experimental sensitivities of SAW devices to acceleration and dynamic temperature effects, the finite-element method (FEM) has been employed to obtain the real stress distribution in the part of the plate where SAW device is fabricated [6], [7].…”

Section: Introductionmentioning

confidence: 99%

Pressure-sensitive cuts for surface acoustic waves in /spl alpha/-quartz

Taziev

Kolosovsky

Kozlov

1995

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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“…The perturbation method was used to determine the normal stress sensitivities which are used along with the biaxial components to determine the acceleration sensitivity of the SAW device [6]. Although the biaxial stress components from the SAW substrate are necessary to calculate the acceleration sensitivity, a comparison of the biaxial stress components in the base of the hybrid package reveals a different ratio between the unrotated and rotated cases.…”

Section: Discussionmentioning

confidence: 99%

Designing smaller SAW oscillators for low vibration sensitivity

Andres

Parker

Proceedings of IEEE 48th Annual Symposium on Frequency Control

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All quartz package (AQP) Surface Acoustic Wave (SAW) hybrid circuit oscillators with low vibration sensitivity, typically 3 to 4~1 0 -'~/ g , have been routinely achieved, provided that the oscillator package is sufficiently rigid to minimize bending stresses caused by vibration loading. This has been accomplished by bonding a suitably thick ceramic stiffener to the base of the oscillator housing. However, because of size constraints, some applications cannot accommodate a sufficiently thick stiffener. One approach toward overcoming this potential limitation on performance is to use finite element analysis to determine the stresses in the base of an oscillator package that would otherwise have an insufficiently thick stiffener, and then arrange to mount the AQP SAW device in a region of minimal stress. This approach was verified experimentally by comparing the vibration sensitivity of the same oscillator with the AQP SAW device mounted in both high-and low-stress regions. The result of the experiment was a factor of two reduction in the oscillator's vibration sensitivity. An alternative approach is to apply mass loading directly to the AQP SAW device. This is accomplished by bonding two small weights, approximately 60 mg each, to the backside of the AQP SAW substrate. Under vibration loading, these weights alter the stress gradients in the active acoustic area of the SAW substrate which reduces 7 , the magnitude of the vibration sensitivity vector.The same procedure was unsuccessfully applied to AQP SAW oscillators that had sufficiently thick stiffeners. Thus, mass loading is only effective in decreasing i: for an oscillator with an insufficiently thick stiffener.

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“…The spring constant, ksys, is computed as where k, is the spring constant due to bending of the beam, k2 is the spring constant due to residual stress, and k3 is the spring constant due to non-linear forces resulting from large deflections. For the designed system, small ' + (7) where W = 2nfis the angular frequency, f is the frequency in Hz, a n d u o = 2e0 = ,/m is the angular resonant frequency of the mass-spring system with fo the resonant frequency in Hz.…”

Section: Calculation Of the Vibration Sensitivitymentioning

confidence: 99%

“…Acceleration of the resonator results in body forces being applied to the resonator by the mounting structure which results in a deformation of the crystal [4,7]. This deformation causes a change in the resonator transimpedance [4,5].…”

Section: Introductionmentioning

confidence: 99%

A micromachined vibration isolation system for a 1 GHz STW resonator

Reid¹,

Bright²,

Kosinski³

Proceedings of International Frequency Control Symposium

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A micromachined system has been developed for reducing the vibration sensitivity of surface transverse wave ( S W ) resonators. The isolation system consists of a support platform for mounting the STW resonator, four support arms, and a support rim. The entire isolation system measures 8 mm by 9 mm by 0.4 mm without the resonator mounted on the platform. The system acts as a passive vibration isolation system, decreasing the magnitude of high Frequency (> 1.2 kHz) vibrations. Vibration sensitivity measurements were taken for vibrations with frequencies ranging from 100 Hz to 5 kHz. The measured data show that the system performs as expected with a low frequency (c 500 Hz) vibration sensitivity of 1.8 * lO-*/g and a high frequency roll off of 12 dB/octave.

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Acceleration and Vibration Sensitivity of SAW Devices

Cited by 39 publications

References 17 publications

Pressure-sensitive cuts for surface acoustic waves in /spl alpha/-quartz

Pressure-sensitive cuts for surface acoustic waves in /spl alpha/-quartz

Designing smaller SAW oscillators for low vibration sensitivity

A micromachined vibration isolation system for a 1 GHz STW resonator

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