Accelerometer Design for Vehicle Control Safety System

Harrison, Mark; Otsuka, Yuzuru; Sakai, M.

doi:10.4271/2004-01-1116

Cited by 2 publications

(3 citation statements)

References 6 publications

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“…The capacitance change Δ C induced by the displacement y and the sensor output V o obtained from the differential detection circuits are defined by Eqs. (2) and (3) [5]. where ${\omega _a}$ is the natural angular frequency of the acceleration detection vibration system.…”

Section: Design Of Capacitive Combined Sensormentioning

confidence: 99%

“…Generally, the electrical method can compensate for shifts and drifts of sensor performance caused by environmental temperature variation [5]. However, when the shifts and drifts are not linear, map compensation or high‐order compensation is required.…”

Section: Introductionmentioning

confidence: 99%

“…In order to facilitate electrical compensation, several structural approaches to preventing nonlinear drifts and shifts or to compensation for them by dissipating the environmental temperature change and mounting oriented deformations have been considered. One approach absorbs the deformation by using soft glue [5] to attach the sensor element to the package surface. The other approaches use folded beams to support moving parts and place the anchors that fix the beams in an adjacent area to absorb the deformations structurally [6].…”

Section: Introductionmentioning

confidence: 99%

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Three‐axis MEMS combined sensor for electronic stability control system

Jeong

Goto

Aono

et al. 2012

Elect Comm in Japan

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We developed a microelectromechanical systems (MEMS) combined sensor that can measure two‐axis accelerations and angular rate (rotation) for use in electronic stability control systems for automobiles. The recent trend of mounting combined sensors in the engine compartment of vehicles has led to a dramatic increase in the operation temperature range as well as demands for immunity to environmental disturbances such as vibration. In this paper, we propose a combined sensor that has one gyroscopic part and two acceleration parts placed on a single die. We used a deformation‐robust MEMS structure to ensure stable operation over a wide temperature range (–40 to 125 °C) in the engine compartment. A package as small as 10 × 19 × 4 mm was achieved by using through silicon via and wafer‐level package technologies. The performance of the sensor was sufficient to meet current automotive standards. © 2012 Wiley Periodicals, Inc. Electron Comm Jpn, 95(7): 49–57, 2012; Published online in Wiley Online Library (http://wileyonlinelibrary.com). DOI 10.1002/ecj.11376

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Section: Design Of Capacitive Combined Sensormentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Three‐axis MEMS combined sensor for electronic stability control system

Jeong

Goto

Aono

et al. 2012

Elect Comm in Japan

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Three Axes MEMS Combined Sensor for Electronic Stability Control System

Jeong¹,

Goto²,

Aono³

et al. 2011

IEEJ Trans. SM

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A microelectromechanical systems (MEMS) combined sensor measuring two-axis accelerations and an angular rate (rotation) has been developed for an electronic stability control system of automobiles. With the recent trend to mount the combined sensors in the engine compartment, the operation temperature range increased drastically, with the request of immunity to environmental disturbances such as vibration. In this paper, we report the combined sensor which has a gyroscopic part and two acceleration parts in single die. A deformation-robust MEMS structure has been adopted to achieve stable operation under wide temperature range (-40 to 125ºC) in the engine compartment. A package as small as 10 × 19 × 4 mm is achieved by adopting TSV (through silicon via) and WLP (wafer-level package) technologies with enough performance as automotive grade.

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Accelerometer Design for Vehicle Control Safety System

Cited by 2 publications

References 6 publications

Three‐axis MEMS combined sensor for electronic stability control system

Three‐axis MEMS combined sensor for electronic stability control system

Three Axes MEMS Combined Sensor for Electronic Stability Control System

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