Accuracy and resolution limits in quartz and silicon substrates with microelectrodes for electrochemical biosensors

Carminati, Marco; Vergani, Marco; Ferrari, Giorgio; Caranzi, Lorenzo; Caironi, Mario; Sampietro, Marco

doi:10.1016/j.snb.2012.08.021

Cited by 25 publications

(10 citation statements)

References 26 publications

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“…If the ASIC is also realized on the same substrate, it must be clearly a silicon substrate, and the distance from the electrodes to the substrate should be maximized (as in the case of the CLIPP and PM 1 detector). Instead, if the substrate is passive, that is, a purely mechanical support of microelectrodes as in electrochemical cartridge chips coupled to microfluidics [41], then an insulating substrate such as glass or quartz should be definitely preferred [86].…”

Section: Parasitics and Miniaturizationmentioning

confidence: 99%

Advances in High-Resolution Microscale Impedance Sensors

Carminati

2017

Journal of Sensors

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Sensors based on impedance transduction have been well consolidated in the industry for decades. Today, the downscaling of the size of sensing elements to micrometric and submicrometric dimensions is enabled by the diffusion of lithographic processes and fostered by the convergence of complementary disciplines such as microelectronics, photonics, biology, electrochemistry, and material science, all focusing on energy and information manipulation at the micro- and nanoscale. Although such a miniaturization trend is pivotal in supporting the pervasiveness of sensors (in the context of mass deployment paradigms such as smart city, home and body monitoring networks, and Internet of Things), it also presents new challenges for the detection electronics, reaching the zeptoFarad domain. In this tutorial review, a selection of examples is illustrated with the purpose of distilling key indications and guidelines for the design of high-resolution impedance readout circuits and sensors. The applications span from biological cells to inertial and ultrasonic MEMS sensors, environmental monitoring, and integrated photonics.

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Section: Parasitics and Miniaturizationmentioning

confidence: 99%

Advances in High-Resolution Microscale Impedance Sensors

Carminati

2017

Journal of Sensors

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“…Instead, in the case of electrical detection with electrodes fabricated on the bottom layer, the parasitic coupling due to the conductive substrate must be taken into consideration and insulating substrate materials (such as glass and quartz) should be preferred. 11 The SiNR dry lm, available in rolls ( Fig. 3a), is applied to the silicon substrate by means of lamination.…”

Section: Photo-patternable Adhesive Microfluidicsmentioning

confidence: 99%

Microfluidic structures for large-scale manufacture combining photo-patternable materials

et al. 2016

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A novel application of SiNR, a photo-patternable adhesive material, commonly used for wafer bonding, is proposed as a promising option for fabricating, at industrial scale, fully assembled microfluidic devices at wafer level with resolution down to 15 μm. A self-sealing microchamber for real-time PCR analysis combining laminated SiNR dry films with in situ photo-patterned hydrogel passive valves is presented

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“…75 Studies have shown that 1/f noise in carbon nanotube transistors is a strong function of device length, 76 suggesting simple scaling of the transistor geometry may reduce noise levels. The noise spectrum would be expected to reach a shot noise floor and a capacitive noise regime, 77 but this may be negligible until flicker noise levels are reduced.…”

Section: Nanowire and Nanotube Fetsmentioning

confidence: 99%

Single‐molecule bioelectronics

Rosenstein

Lemay

Shepard

2014

WIREs Nanomed Nanobiotechnol

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Experimental techniques which interface single biomolecules directly with microelectronic systems are increasingly being used in a wide range of powerful applications, from fundamental studies of biomolecules to ultra-sensitive assays. Here we review several technologies which can perform electronic measurements of single molecules in solution: ion channels, nanopore sensors, carbon nanotube field-effect transistors, electron tunneling gaps, and redox cycling. We discuss the shared features among these techniques that enable them to resolve individual molecules, and discuss their limitations. Recordings from each of these methods all rely on similar electronic instrumentation, and we discuss the relevant circuit implementations and potential for scaling these single-molecule bioelectronic interfaces to high-throughput arrayed sensing platforms.

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Accuracy and resolution limits in quartz and silicon substrates with microelectrodes for electrochemical biosensors

Cited by 25 publications

References 26 publications

Advances in High-Resolution Microscale Impedance Sensors

Advances in High-Resolution Microscale Impedance Sensors

Microfluidic structures for large-scale manufacture combining photo-patternable materials

Single‐molecule bioelectronics

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