Abstract:The theory of best focus determination in focus wedge mark (FWM) metrology is extended from coherent illumination to partially coherent illumination. Through a theoretical analysis, we propose a focus curve fitting function suitable for the FWM, which is expressed by the sinc function. The experimental results for best focus estimations using two types of fitting functions, which are a conventional quadratic polynomial and the proposed sinc function, are reported for various defocus regions to be fitted. When … Show more
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