1998
DOI: 10.1002/(sici)1096-9918(199804)26:4<249::aid-sia368>3.0.co;2-a
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Accuracy of the non-destructive surface nanostructure quantification technique based on analysis of the XPS or AES peak shape

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Cited by 269 publications
(137 citation statements)
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“…The method relies on the fact that the energy distribution of emitted electrons depends on the in-depth concentration profile and is able to differentiate among thin and thick homogeneous overlayers, buried layers, three-dimensional island structures on different substrates, etc. The theoretical framework of the technique is described in detail in the literature [31]. The validity of the technique has been established through systematic experimental investigations and comparison to measurements on the same samples by Rutherford backscattering spectrometry, ion scattering spectrometry, and atomic force microscopy [31][32][33][34].…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…The method relies on the fact that the energy distribution of emitted electrons depends on the in-depth concentration profile and is able to differentiate among thin and thick homogeneous overlayers, buried layers, three-dimensional island structures on different substrates, etc. The theoretical framework of the technique is described in detail in the literature [31]. The validity of the technique has been established through systematic experimental investigations and comparison to measurements on the same samples by Rutherford backscattering spectrometry, ion scattering spectrometry, and atomic force microscopy [31][32][33][34].…”
Section: Resultsmentioning
confidence: 99%
“…The theoretical framework of the technique is described in detail in the literature [31]. The validity of the technique has been established through systematic experimental investigations and comparison to measurements on the same samples by Rutherford backscattering spectrometry, ion scattering spectrometry, and atomic force microscopy [31][32][33][34]. The corresponding spectra processing is presently facilitated by the commercial software package QUASES-Tougaard [35].…”
Section: Resultsmentioning
confidence: 99%
“…A very important issue is the assessment of the in-depth atom distribution after different plasma treatments. With this aim, we have used the XPS peak shape analysis developed by Tougaard [25,26]. This analysis has provided a semiquantitative description of the oxygen/carbon depth distributions for both the "treated" and "aged" samples.…”
Section: Introductionmentioning
confidence: 99%
“…We used the QUASES [20] software to model and reproduce the experimental spectra. The basis of the method relies on the Tougaard's concepts of inelastic background analysis derived from an appropriate description of the electron energy losses during transport in the solid [15,16]. Outputs from the calculations are an in-depth concentration profile of photo-emitting atoms and/or the resulting surface morphology of the existing aggregates on the surface.…”
Section: Methodsmentioning
confidence: 99%
“…The method relies on the Tougaard's concepts of inelastic scattering or electrons in solids [15,16]. In addition, transmission electron microscopy (TEM) analysis was used to confirm the type of growth mechanism when silicon wafers were used as substrates.…”
Section: Introductionmentioning
confidence: 99%