SUMMARYIn order to attempt performance improvement of a surface acoustic wave motor, it is necessary to understand the contact condition between the stator substrate and the slider and to determine the relationship between the basic performance and the physical parameters. In this research, a simulation model taking into account the tangential rigidity on the stator substrate surface is proposed. The effects of parameters such as the friction coefficient, amplitude, and rigidity on the driving performance are elucidated. The validity of the proposed model is demonstrated by a comparison with the experimental results. In addition, detailed calculations are carried out, including determination of the normal position change of the slider by means of the simulation model.