2009
DOI: 10.1143/jjap.48.070204
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Achievement of High Density InAs/GaInAsP Quantum Dots on Misoriented InP(001) Substrates Emitting at 1.55 µm

Abstract: InAs quantum dot (QD) formation on InP(001) has been investigated by gas source molecular beam epitaxy as a function of the substrate misorientation, arsenic pressure and temperature. A large improvement on quantum dot shape and density was obtained thanks to the use of substrates misoriented toward the [1 1 10] direction and low arsine flow rate. Round-shaped small QDs (diameter: 26 nm) in high density (9 Â 10 10 QDs/cm 2 ) have been achieved using optimized growth conditions. Room temperature laser emission … Show more

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Cited by 12 publications
(3 citation statements)
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“…These substrates helped in modifying the In diffusion length arising from the atomic steps thus resulting in more isotropic nanostructure formation, as discussed initially in this section. Elias et al [72] employed a growth interruption step after InAs deposition on 1.18 µm InGaAsP buffer layer for 30 s under As overpressure, and compared the nanostructure formation on the nominal (N), and 2º off-cut towards (111)A and (111)B, (100) InP substrates forming surface steps namely; A steps and B steps which will be used henceforth. At high As flow rate, larger (~50 nm diameter) and lower density (~2×10 10 cm -2 ) Qdots were formed independent of the substrate orientation.…”
Section: Qdots On (100) Inp Substratementioning
confidence: 99%
“…These substrates helped in modifying the In diffusion length arising from the atomic steps thus resulting in more isotropic nanostructure formation, as discussed initially in this section. Elias et al [72] employed a growth interruption step after InAs deposition on 1.18 µm InGaAsP buffer layer for 30 s under As overpressure, and compared the nanostructure formation on the nominal (N), and 2º off-cut towards (111)A and (111)B, (100) InP substrates forming surface steps namely; A steps and B steps which will be used henceforth. At high As flow rate, larger (~50 nm diameter) and lower density (~2×10 10 cm -2 ) Qdots were formed independent of the substrate orientation.…”
Section: Qdots On (100) Inp Substratementioning
confidence: 99%
“…[1−3] On the other hand, InAs/InP QD lasers are of great interest as they can emit in a wide wavelength range (1.4-2.1 µm), which has promising prospects in optical fiber communication, gas detection, and biomedical applications. [4,5] Several growth techniques including chemical beam epitaxy (CBE), [6] molecular beam epitaxy (MBE) [7−9] and metalorganic chemical vapor deposition (MOCVD) have been proposed to grow the InAs/InP QDs. [4,10−14] However, due to the low lattice mismatch and the anion exchange across the interface, the growth of high quality of InAs/InP QDs is more difficult.…”
Section: (Received 22 February 2013)mentioning
confidence: 99%
“…Correspondingly, 1.55 µm InAs QDs growth has been accomplished using the same technique for a long time. However, results on InP (001) substrates [6,[23][24][25], are not as impressive as those on InP (311) substrates [26,20,22]. This may be due to the fact that the shape of the QD on InP (001) is more or less inclined to form a quantum dash, although, on InP (311), it is not.…”
mentioning
confidence: 90%