Achieving high effective<i>Q</i>-factors in ultra-high vacuum dynamic force microscopy

Lübbe, Jannis; Tröger, L.; Torbrügge, Stefan; Bechstein, Ralf; Richter, Christoph; Kühnle, Angelika; Reichling, Michael

doi:10.1088/0957-0233/21/12/125501

Cited by 52 publications

(60 citation statements)

References 34 publications

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“…[15][16][17][18] There are several mechanisms contributing to the damping of oscillating cantilevers. 19 The total damping, or the inverse of effective quality-factor 1/Q e f f , can be defined as the sum of different elements: intrinsic damping 1/Q 0 , fixation damping 1/Q mount , and air damping 1/Q air ,…”

Section: B Vacuum Effects On Beamsmentioning

confidence: 99%

Influence of mechanical noise inside a scanning electron microscope

Faria

Haddab

Gorrec

et al. 2015

Review of Scientific Instruments

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The scanning electron microscope is becoming a popular tool to perform tasks that require positioning, manipulation, characterization, and assembly of micro-components. However, some of these applications require a higher level of performance with respect to dynamics and precision of positioning. One limiting factor is the presence of unidentified noises and disturbances. This work aims to study the influence of mechanical disturbances generated by the environment and by the microscope, identifying how these can affect elements in the vacuum chamber. To achieve this objective, a dedicated setup, including a high-resolution vibrometer, was built inside the microscope. This work led to the identification and quantification of main disturbances and noise sources acting on a scanning electron microscope. Furthermore, the effects of external acoustic excitations were analysed. Potential applications of these results include noise compensation and real-time control for high accuracy tasks.

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Section: B Vacuum Effects On Beamsmentioning

confidence: 99%

Influence of mechanical noise inside a scanning electron microscope

Faria

Haddab

Gorrec

et al. 2015

Review of Scientific Instruments

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“…At pressures below p < 10 6 mbar viscous damping is negligible [15]. The second effect might be partly eliminated by means of rigid clamping and avoiding of glues with high damping rates [16].…”

Section: Internal Friction Of the Cantilevermentioning

confidence: 99%

Non-contact Friction

Kisiel

Samadashvili

Gysin

et al. 2015

Noncontact Atomic Force Microscopy

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Our understanding of friction and mechanism of energy dissipation has undoubtedly experienced a tremendous profit after the introduction of scanning probe microscopy. Nowadays the tribological response of a sliding asperity can be easily traced down to the atomic scale. Still, many important aspects of friction on the nanoscale are scarcely studied. Among them we can easily recognize the dissipation accompanying the motion of a nano-object in close proximity to a solid surface. An example, which is quite suitable for experimental investigations, is given by the oscillations of a tiny pendulum. Here we report on different mechanisms of energy loss-for instance probably the most common Joule dissipation. Next we demonstrate that pendulum oscillations are expected to induce both phononic and electronic excitations in the underlying surface and the clear distinction between them is possible while working over metal/superconductor phase transition. Finally, we describe an example of coupling of mechanical oscillator to the charge-density-wave phase, an exquisitely subtle long-range order property of matter.

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“…For high sensitive measurements in non-contact mode in air or vacuum, a cantilever with high mechanical quality factor, a harmonic oscillating behavior and a force constant higher than 1.5 N/ m, avoiding a snap to surface, is required. Especially in ultra high vacuum the quality factor of the cantilever is only determined by intrinsic damping mechanisms (Lübbe et al 2010). Monocrystalline silicon offers, in contrast to polycrystalline or amorphous materials and metals, a comparable low intrinsic damping; especially the volume loss is almost zero (Albrecht et al 1990).…”

Section: Cantilever Materialsmentioning

confidence: 99%

Cantilever probes for high speed AFM

et al. 2012

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Since the invention in 1986 atomic force microscopy (AFM) has become the most widely used scanning probe microscopy (Binnig et al. in Phys Rev Lett 56:930-933, 1986). The microscope images the interaction of forces like Van der Waals or Coulomb forces between a sample and the apex of a small tip integrated near the free end of a flexible cantilever. But as all other scanning probe techniques the AFM requires serial data acquisition and suffers therefore from a low temporal resolution. Enhancing the speed to video rate imaging makes high demands on scanner technology, control electronics and on the key feature the cantilever with integrated sharp stylus. For the cantilever probes, fundamental resonance frequencies in the MHz regime are envisaged while the force constant of a few nN/nm shall be maintained. We present different novel AFM probes with ultrashort cantilevers and integrated sharp tips for high speed AFM while focusing on widely dispersed applications and on aspects of mass fabrication.

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Achieving high effectiveQ-factors in ultra-high vacuum dynamic force microscopy

Cited by 52 publications

References 34 publications

Influence of mechanical noise inside a scanning electron microscope

Influence of mechanical noise inside a scanning electron microscope

Non-contact Friction

Cantilever probes for high speed AFM

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