Achieving unlimited recording length in interference lithography via broad-beam scanning exposure with self-referencing alignment

Ma, Dongsheng; Zhao, Yuxuan; Zeng, Lijiang

doi:10.1038/s41598-017-01099-3

Cited by 11 publications

(3 citation statements)

References 22 publications

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“…2(a) . By varying the incidence angle, that is, the angle between the light incident on the electrode surface and the line perpendicular to the surface, the diameters of the PR nanoholes could be freely varied without the use of a photomask 31 , 38 – 45 . The PR nanohole patterns on the ITO substrate were then used as templates to deposit gold via ECD.…”

Section: Resultsmentioning

confidence: 99%

Electrochemical detection of dopamine using periodic cylindrical gold nanoelectrode arrays

Kim

Kang

Baek

et al. 2018

Sci Rep

145

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Dopamine is a key molecule in neurotransmission and has been known to be responsible for several neurological diseases. Hence, its sensitive and selective detection is important for the early diagnosis of diseases related to abnormal levels of dopamine. In this study, we reported a new cylindrical gold nanoelectrode (CAuNE) platform fabricated via sequential laser interference lithography and electrochemical deposition. Among the fabricated electrodes, CAuNEs with a diameter of 700 nm, 150 s deposited, was found to be the best for electrochemical dopamine detection. According to cyclic voltammetry results, the linear range of the CAuNE-700 nm was 1–100 µM of dopamine with a limit of detection (LOD) of 5.83 µM. Moreover, owing to the homogeneous periodic features of CAuNEs, human neural cells were successfully cultured and maintained for more than 5 days in vitro without the use of any extracellular matrix proteins and dopamine was detectable in the presence of these cells on the electrode. Therefore, we concluded that the developed dopamine sensing platform CAuNE can be used for many applications including early diagnosis of neurological diseases; function tests of dopaminergic neurons derived from various stem cell sources; and toxicity assessments of drugs, chemicals, and nanomaterials on human neuronal cells.

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Section: Resultsmentioning

confidence: 99%

Electrochemical detection of dopamine using periodic cylindrical gold nanoelectrode arrays

Kim

Kang

Baek

et al. 2018

Sci Rep

145

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show abstract

“…There are two major types of optical configuration for the laser interference lithography: the one is referred to as the division of amplitude system [59,125,126,127,128,129]. Figure 19a shows an optical setup of the phase-shift laser interference lithography [59], which is a kind of division of amplitude system.…”

Section: Fabrication and Verification Of Scale Gratingmentioning

confidence: 99%

“…Meanwhile, the optical setup based on the two-beam interference lithography tends to become complicated and weak against external disturbances due to the long optical paths of the sub-beams. Some methods have been proposed so far to overcome the problem [127,128,129]. For example, the angular motion errors θ X and θ Z of the substrate about the X and Z -axes, respectively, will affect the profile uniformity of the pattern structures as well as the grating pitch.…”

Section: Fabrication and Verification Of Scale Gratingmentioning

confidence: 99%

Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors

Shimizu

Matsukuma

Gao

2019

Sensors

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In dimensional metrology it is necessary to carry out multi-axis angle and displacement measurement for high-precision positioning. Although the state-of-the-art linear displacement sensors have sub-nanometric measurement resolution, it is not easy to suppress the increase of measurement uncertainty when being applied for multi-axis angle and displacement measurement due to the Abbe errors and the influences of sensor misalignment. In this review article, the state-of-the-art multi-axis optical sensors, such as the three-axis autocollimator, the three-axis planar encoder, and the six-degree-of-freedom planar encoder based on a planar scale grating are introduced. With the employment of grating reflectors, measurement of multi-axis translational and angular displacement can be carried out while employing a single laser beam. Fabrication methods of a large-area planar scale grating based on a single-point diamond cutting with the fast tool servo technique and the interference lithography are also presented, followed by the description of the evaluation method of the large-area planar scale grating based on the Fizeau interferometer.

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Evaluation of wavefront aberrations induced by overlay errors in stitching computer-generated holograms

Bai

Zhang

Chen

et al. 2022

Optics and Lasers in Engineering

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Achieving unlimited recording length in interference lithography via broad-beam scanning exposure with self-referencing alignment

Cited by 11 publications

References 22 publications

Electrochemical detection of dopamine using periodic cylindrical gold nanoelectrode arrays

Electrochemical detection of dopamine using periodic cylindrical gold nanoelectrode arrays

Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors

Evaluation of wavefront aberrations induced by overlay errors in stitching computer-generated holograms

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