Acid formation in polymer solids by radiation-induced chain reactions of diphenyliodonium salts

Abstract

In order to develop chemically amplified radiation resist having ability of acid multiplication, acid formation in -irradiated polymer films and solutions of acetal compounds containing diphenyliodonium salt has been studied.Acids were generated in the films and solutions by chain reactions in large G-value. The G-value depends on the chemical structure of the polymers and acetal compounds. Compounds containing cyclic acetal structure give large G-values. This dependence can be explained by difference in the possibility of the electron transfer from radicals of the polymers and acetal compounds to diphenyliodonium salt. Polyvinyl acetals will be a candidate for the dually amplified resist.

Structure versus Thermal Stability: The Periodic Structure of Atomic Layer Deposition-Grown Al-Incorporated HfO2 Films and Its Effects on Amorphous Stabilization

“…Unlike ALD-grown HfO 2 −Al 2 O 3 nanolaminates, which are composed of thicker HfO 2 and Al 2 O 3 stacks in the thickness of several angstroms, , it is more difficult to characterize the periodicity of the films used herein since only one ALD layer of Al 2 O 3 is inserted and this will not form a complete monolayer of Al 2 O 3 . Direct methods are less likely to work in characterizing the periodicity of Al-HfO 2 films grown in [ x Hf + 1Al] sequences.…”

Radiation Processing of Polymer-based Nanomaterials

“…In general, the materials processing methods with the aid of physical effects, chemical effects and biology effects between high-energy radiation (such as gamma ray and electron beam) and matter is called radiation processing. At present, although the radiation processing obtain the very good application in many fields of polymwric materials [1][2][3][4][5][6][7][8][9][10][11][12][13], while the parathion of polymer-based nanocomposites via radiation technology is still a new field of polymer radiation processing.…”