Acoustic isolation of disc‐shaped modes using periodic corrugated plate‐based phononic crystal

Moutaouekkil, Mohammed; Talbi, Abdelkrim; Boudouti, El Houssaine El; Elmazria, O.; Djafari‐Rouhani, Bahram; Pernod, Philippe; Matar, Olivier Bou

doi:10.1049/el.2017.4029

Cited by 2 publications

(2 citation statements)

References 19 publications

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“…19) This ability to control the propagation of elastic waves with such metamaterials has attracted considerable attention during the last few decades. [20][21][22] Wave propagation in PnCs can be analyzed using the equation of motion given by: [23][24][25][26][27][28]…”

Section: Theory Of Wave Propagation In Pncsmentioning

confidence: 99%

Design for high-quality factor of piezoelectric-on-silicon MEMS resonators using resonant plate shape and phononic crystals

Workie

Bao

et al. 2021

Jpn. J. Appl. Phys.

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Piezoelectric-on-silicon MEMS resonator is very well known for its compatibility with CMOS integrated circuit technology. However, its quality factor (Q) is highly affected by acoustic energy loss through the supporting structures. In this study, a resonator with butterfly-like round edge resonating plate structure and deploying properly designed PnC arrays on the tether and the anchoring boundaries are proposed to scale up the quality factor by effectively reducing the energy loss. The finite element analysis simulation results reveal that the proposed topologies can efficiently change the displacement field in the resonating plate and reduce the anchor loss. Consequently, an unloaded quality factor Q u of the conventional resonator is raised from 29 899 to 51 503 (butterfly-like round edge resonating structure), 83 349 (Phononic crystal on the tether) and 83 899 (Phononic crystal on the anchor), representing 1.7 folds, 2.78 folds and 2.8 folds improvement respectively.

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Section: Theory Of Wave Propagation In Pncsmentioning

confidence: 99%

Design for high-quality factor of piezoelectric-on-silicon MEMS resonators using resonant plate shape and phononic crystals

Workie

Bao

et al. 2021

Jpn. J. Appl. Phys.

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“…Many authors have studied the defect states in such phononic crystals and demonstrated their usefulness as waveguides, filters, and cavity modes. [23][24][25][26][27][28][29][30][31][32][33][34][35][36] In a recent paper, 37 we have proposed a phononic crystal based on 1D grooves placed periodically in one direction and surmounted by disc shaped thin metallic films deposited periodically on each groove. This platform enabled us to obtain highly confined disc shaped radial contour modes, characterized by their high Q factor and surface mode nature.…”

Section: Introductionmentioning

confidence: 99%

Highly confined radial contour modes in phononic crystal plate based on pillars with cap layers

Moutaouekkil

Talbi

Boudouti³

et al. 2019

Journal of Applied Physics

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We investigate highly confined and isolated surface modes in a phononic crystal plate based on pillars with cap layers. The structure is made of a thin membrane supporting periodic pillars each composed of one cylinder surmounted by a disk shaped cap layer. An optimal choice of the geometrical parameters and material composition allows the structure to support isolated radial contour modes confined in the cap layer. In this study, we consider diamond and gold (Au) as the pillar and cap layers, respectively, and aluminum nitride as a thin membrane owing to the strong contrast in their elastic and density properties and to their compatibility with the integrated circuit technology and microwave electroacoustic devices. The phononic crystal based on diamond pillars allows us to induce a wide stop band frequency, and the addition of the Au disk shaped layer on diamond pillars enables us to introduce flat modes within the bandgap. We demonstrate that one can optimize the flat mode frequencies by varying the geometrical parameters of the Au cap layer. The quality factor (Q) of a cavity resonator composed of one line gold/diamond pillar surrounded by an array of diamond pillars on both sides has been investigated. These results clearly show that, using this design approach, one can (i) reduce the acoustic energy leakage out of the resonator and (ii) optimize the cavity resonator’s Q factor by varying only the geometrical parameters of the gold cap layer. The proposed design provides a promising solution for advanced signal processing and sensing applications.

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Acoustic isolation of disc‐shaped modes using periodic corrugated plate‐based phononic crystal

Cited by 2 publications

References 19 publications

Design for high-quality factor of piezoelectric-on-silicon MEMS resonators using resonant plate shape and phononic crystals

Design for high-quality factor of piezoelectric-on-silicon MEMS resonators using resonant plate shape and phononic crystals

Highly confined radial contour modes in phononic crystal plate based on pillars with cap layers

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