2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) 2010
DOI: 10.1109/memsys.2010.5442405
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Acoustic mixing and chromatography in a PZT driven silicon microfluidic actuator

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“…Acoustic streaming, most likely fast coarse-grained streaming, was found to be present and driving the particles about the disks. Nine years later, the same group [Araz and Lal (2010)] reported on a microfluidic particle manipulation system for chromatography that makes use of PZT in vibrating a rather complex microstructure fabricated from polycrystalline Si, SiN, and SiO 2 to effectively separate 3 and 10 m particles out of a colloidal suspension.…”
Section: In Closed Environmentsmentioning
confidence: 99%
“…Acoustic streaming, most likely fast coarse-grained streaming, was found to be present and driving the particles about the disks. Nine years later, the same group [Araz and Lal (2010)] reported on a microfluidic particle manipulation system for chromatography that makes use of PZT in vibrating a rather complex microstructure fabricated from polycrystalline Si, SiN, and SiO 2 to effectively separate 3 and 10 m particles out of a colloidal suspension.…”
Section: In Closed Environmentsmentioning
confidence: 99%