Acoustic mode behavior in Lateral Field Excited sensors

Lateral field excited LiTaO<inf>3</inf> acoustic wave sensing platform

“…As was shown in [11] spurious modes can be reduced in LTO LFE devices by the etching of a mesa structure on the sensor surface. It was also shown in [11] that for LFE AT-cut .55" diameter quartz sensors plano-convex type curvature improves LFE sensor Q, effective coupling, and mode spectrum making these devices more suitable for oscillator based measurements.…”

“…It was also shown in [11] that for LFE AT-cut .55" diameter quartz sensors plano-convex type curvature improves LFE sensor Q, effective coupling, and mode spectrum making these devices more suitable for oscillator based measurements. In this work, the effect of contoring the surface of LTO LFE devices was examined.…”

“…Devices were tested inside a PID controlled Tenney environmental test chamber using a simple PCB test fixture [11]. The resonant frequency of each sample was monitored continuously with an HP8751A network analyzer to ensure that oven and sample had reached thermal equilibrium.…”

“…Prototype LFE LTO sensors have been fabricated and found to operate at frequencies in excess of 1 GHz and sensitively detect viscosity, conductivity, and dielectric constant changes in liquids. More recently it has been shown that spurious modes are reduced for LFE LTO sensors by the etching of a mesa structure on the sensor surface [11]. It is the purpose of this paper to further examine theoretically and experimentally the temperature behavior of two families of LTO crystallographic orientations supplied by two different crystal manufacturers.…”