“…Among them, microfluidic actuators driven by piezoelectric materials have attracted widespread attention at home and abroad. In recent years, studies on piezoelectric fluid actuators, such as piezoelectric hydraulic motor (Denkena et al, 2017; Qian et al, 2020), piezoelectric injection valve (Gu et al, 2015; Lu et al, 2016; Zhou et al, 2017), piezoelectric pump (Li et al, 2021; Zhao and Ji, 2019; Dau and Dinh, 2015; Wada et al, 2014; Zhang et al, 2017), and piezoelectric mixer (Nam and Lim, 2018; Wang et al, 2018) etc., are continuously surging. Piezoelectric pumps use the tiny vibration of the piezoelectric actuator to directly or indirectly drive the fluid, which can realize the accurate delivery and control of the fluid.…”