Acoustic wave sensing devices and their LTCC packaging

Giangu, Ioana; Buiculescu, Valentin; Konstantinidis, George; Szaciłowski, Konrad; Ştefănescu, Alin; Bechtold, Franz; Pilarczyk, Kacper; Stavrinidis, A.; Kwolek, Przemysław; Stavrinidis, G.; Mech, Justyna; Müller, Andres

doi:10.1109/smicnd.2014.6966418

Cited by 3 publications

(2 citation statements)

References 12 publications

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“…Examples of acoustic wave devices as sensors have been published for temperature [1,2], gas [3,4], mass [5,6], light [7,8], pressure [9][10][11][12][13][14][15][16][17], as well as other detection applications. When these sensors are used to detect pressure, strain and stress generate in the structures and change the natural frequency [18].…”

Section: Introductionmentioning

confidence: 99%

A film bulk acoustic resonator-based high-performance pressure sensor integrated with temperature control system

Zhang

Zhao

et al. 2017

J. Micromech. Microeng.

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This paper presented a high-performance pressure sensor based on a film bulk acoustic resonator (FBAR). The support film of the FBAR chip was made of silicon nitride and the part under the resonator area was etched to enhance the sensitivity and improve the linearity of the pressure sensor. A micro resistor temperature sensor and a micro resistor heater were integrated in the chip to monitor and control the operating temperature. The sensor chip was fabricated, and packaged in an oscillator circuit for differential pressure detection. When the detected pressure ranged from −100 hPa to 600 hPa, the sensitivity of the improved FBAR pressure sensor was −0.967 kHz hPa−1, namely −0.69 ppm hPa−1, which was 19% higher than that of existing sensors with a complete support film. The nonlinearity of the improved sensor was less than ±0.35%, while that of the existing sensor was ±5%. To eliminate measurement errors from humidity, the temperature control system integrated in the sensor chip controlled the temperature of the resonator up to 75 °C, with accuracy of ±0.015 °C and power of 20 mW.

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Section: Introductionmentioning

confidence: 99%

A film bulk acoustic resonator-based high-performance pressure sensor integrated with temperature control system

Zhang

Zhao

et al. 2017

J. Micromech. Microeng.

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“…Take humidity detection, for example, with ZnO nanostructures or some organic materials as sensitive layers [ 6 , 7 , 8 , 9 , 10 ]; the sensitivity of the QCM sensor was enhanced to −77 Hz/% RH [ 11 ]. Meanwhile, the sensitivity of the FBAR humidity sensor reached −43 kHz/% RH with a resonance frequency of 6 GHz [ 12 ]. In addition, the micro-electro-mechanical systems (MEMS) process for FBAR is compatible with the semiconductor process, so FBAR sensors and the circuit can be easily integrated in a single chip [ 13 ] to obtain the lab-on-a-chip.…”

Section: Introductionmentioning

confidence: 99%

A Sensitivity-Enhanced Film Bulk Acoustic Resonator Gas Sensor with an Oscillator Circuit and Its Detection Application

Zhang

Fang

et al. 2017

Micromachines

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This paper presents a sensitivity-enhanced gas sensor based on a film bulk acoustic resonator (FBAR). It was designed and fabricated with micro through-holes in its top electrode for sensitivity enhancement. The sensor was driven by a Colpitts oscillator circuit, and the output signal had characteristics of a power of −2.6 dBm@3 V and a phase noise of −90 dBc/Hz@100 kHz. In order to test the performance of the sensor, it was used for the detection of relative humidity (RH) and ethanol. When the relative humidity ranged from 25% to 88%, the frequency shift of the sensor was 733 kHz, which was 3.2 times higher than that of the existing FBAR sensor with a complete top electrode. Fitting results of the frequency shift and the relative humidity indicated that the measurement error was within ±0.8% RH. When the ethanol concentration ranged from 0 to 0.2355 g/L, the frequency shift of the sensor was 365 kHz. The effect of the oscillator circuit on the adsorption reaction and temperature response of the FBAR sensor device was analyzed to optimize its detection application.

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Micro Through-hole Array in top Electrode of Film Bulk Acoustic Resonator for Sensitivity Improving as Humidity Sensor

Zhang

Fang

et al. 2015

Procedia Engineering

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Acoustic wave sensing devices and their LTCC packaging

Cited by 3 publications

References 12 publications

A film bulk acoustic resonator-based high-performance pressure sensor integrated with temperature control system

A film bulk acoustic resonator-based high-performance pressure sensor integrated with temperature control system

A Sensitivity-Enhanced Film Bulk Acoustic Resonator Gas Sensor with an Oscillator Circuit and Its Detection Application

Micro Through-hole Array in top Electrode of Film Bulk Acoustic Resonator for Sensitivity Improving as Humidity Sensor

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