2021
DOI: 10.1007/s00502-021-00875-4
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Acoustics on small scales

Abstract: We present a modelling strategy based on the finite element method to describe flexible, piezoelectric structures surrounded by a compressible fluid, including viscosity. Non-conforming interfaces based on the Mortar method are used to couple the different physical domains. Finally, we present an application example of a piezoelectrically actuated MEMS structure to illustrate the modeling procedure and the impact of viscous effects.

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Cited by 3 publications
(5 citation statements)
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“…Heat conduction within the fluid is neglected, and thus one does not need to solve for the temperature perturbation. These linearised Navier-Stokes equations are a simplified case of the full linearised Navier-Stokes (compressible flow) equations taking the temperature field into account [4].…”
Section: Governing Equationsmentioning
confidence: 99%
“…Heat conduction within the fluid is neglected, and thus one does not need to solve for the temperature perturbation. These linearised Navier-Stokes equations are a simplified case of the full linearised Navier-Stokes (compressible flow) equations taking the temperature field into account [4].…”
Section: Governing Equationsmentioning
confidence: 99%
“…The coupling between the solid and thermoviscous domains are enforced using non-conforming interfaces [6]. The coupling between thermoviscous and acoustics are applied using Nitsche-type mortaring method [16]. These methods apply the interface conditions in the weak sense; therefore, the non-conforming grids are supported on their interfaces.…”
Section: Finite Element Formulationmentioning
confidence: 99%
“…Air material properties such as density, visosity and etc. at room temperature and under atmopheric pressure of 1 bar are illustrated in [16].…”
Section: Finite Element Formulationmentioning
confidence: 99%
“…Using complex algebra, the acoustic purturbations pressure, velocity and temperuture take the harmonic form of pe ixt , ve ixt , and Te ixt , respectively [19,20]; a time derivative of any quantity n ( on ot ) becomes ixn. The final linearized conservation equations modeling the fluid behavior in the thermoviscous domain for these small perturbations are [18]…”
Section: Fluid Governing Equationsmentioning
confidence: 99%
“…We use the FEM for solving the linearized conservation of mass, momentum and energy to take viscous and thermal effects into account. The formulation allows couplings to the flexible solid and the acoustic wave equation by using non-conforming interfaces [18]. Employing these formulations, we develop a 3D FEM model of a piezoelectric MEMS loudspeaker.…”
Section: Introductionmentioning
confidence: 99%