Acquisition and quantification of ion images with a camera-based detection system and classical quantification algorithms

Michiels, F.C.M.A.; Vanhoolst, W.; Espen, P. Van; Adams, Fred C.

doi:10.1016/1044-0305(90)80005-8

Cited by 18 publications

(6 citation statements)

References 26 publications

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“…The combination of imaging and depth profile technique allows the measurement of three-dimensional distributions of trace elements in material [3,4]. For this purpose the lateral distribution of the elements of interest are registered in each cycle of a depth profile and saved to hard disk.…”

Section: D-distributionsmentioning

confidence: 99%

Imaging surface spectroscopy for two- and three-dimensional characterization of materials

Hutter

Brunner

Nikolov

et al. 1996

Analytical and Bioanalytical Chemistry

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Secondary ion mass spectrometry (SIMS) exhibits a unique potential for the measurement of two-and three-dimensional distributions of trace elements in advanced materials, which is demonstrated on relevant technological problems. One example is the characterization of high purity iron. With this material segregation experiments have been performed and the initial and final distribution of the trace elements have been measured. Another example is the investigation of the corrosion behaviour of high purity chromium. Samples oxidized with (16)O and (18)O have been measured to explain the growing and adhesion of the oxide layer. All imaging techniques generate a vast quantitiy of data. In order to extract the important information the assistance of chemometric tools is essential. Detection of chemical phases by classification using neural networks or de-noising of scanning-SIMS images by wavelet-filtering demonstrates the increase of the performance of analytical imaging techniques.

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Section: D-distributionsmentioning

confidence: 99%

Imaging surface spectroscopy for two- and three-dimensional characterization of materials

Hutter

Brunner

Nikolov

et al. 1996

Analytical and Bioanalytical Chemistry

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“…Adams and colleagues critically examine the determination of sample heterogeneity, and the experimental uncertainties involved, in a pair of studies on the subject (117,118)) image analysis and computer simulations were incorporated to develop and test their sampling constant model. The same research group also reported on the analytical aspects of ion imagery using SIMS and demonstrated applications of their camera-based detection system for steel and A1 samples (119).…”

Section: Secondary Ion Mass Spectrometrymentioning

confidence: 99%

Atomic mass spectrometry

Koppenaal¹

1992

Anal. Chem.

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“…Secondary ion mass spectrometry (SIMS) exhibits an unique potential for this task: laterally resolved secondary ion signals can be measured during sputter removal of the material, thus yielding signals with n chemical (number of masses or elements measured) and three spatial dimensions [1][2][3].…”

mentioning

confidence: 99%

Three dimensional characterization of trace element distribution in high purity chromium

et al. 1996

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Abstract. The investigation of the distribution of trace elements in two chromium samples with different corrosion resistivity is reported. The concentration of the trace elements in both samples is in the typical range of high purity chromium and did not explain the different behaviour in the corrosion test. To measure the three-dimensional distribution imaging secondary ion mass spectrometry (SIMS) was used. Fine details were measured by scanning SIMS because of the better resolution. An enrichment of nitrogen and carbon at the grain boundaries of the sample with lower corrosion resistivity was observed.Key words: corrosion, material science, grain boundaries, imaging.Many advanced materials like semiconductors, refractory metals and composites derive their qualities from the three-dimensional distribution of trace elements. Secondary ion mass spectrometry (SIMS) exhibits an unique potential for this task: laterally resolved secondary ion signals can be measured during sputter removal of the material, thus yielding signals with n chemical (number of masses or elements measured) and three spatial dimensions [1][2][3].Imaging secondary ion microscopy is an analytical method capable of producing two and three-dimensional spatially resolved information on element distributions of a significantly large and therefore representative volume (10 6 ~tm 3) in a relatively short time (1 hour) due to simultaneous ion bombardment of the whole imaged area of a sample. The typical lateral resolution of the instrument used in this laboratory (CAMECA IMS 31) is 1 gin, the typical depth resolution 5-10 nm.The lateral resolution in imaging mode is limited by the energy distribution of the secondary ions; the increase of the resolution is coupled with a decrease of the transmission of the method. By using a fine focus beam in scanning mode sub-micron resolution can be obtained with full transmission and therefore high

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Acquisition and quantification of ion images with a camera-based detection system and classical quantification algorithms

Cited by 18 publications

References 26 publications

Imaging surface spectroscopy for two- and three-dimensional characterization of materials

Imaging surface spectroscopy for two- and three-dimensional characterization of materials

Atomic mass spectrometry

Three dimensional characterization of trace element distribution in high purity chromium

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