Activation of Dopant Atoms in Silicon by Microwave-Induced Rapid Heating with Wireless Carbon Heating Tubes

Hasumi, Masahiko; Sameshima, Toshiyuki; Seki, R.; Uehara, Takuma; Arima, Takuji; Miyazaki, Tomoyoshi; Kobayashi, Go; Serizawa, Izumi

doi:10.7567/ssdm.2020.f-10-07

Extended Abstracts of the 2020 International Conference on Solid State Devices and Materials 2020

DOI: 10.7567/ssdm.2020.f-10-07

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Activation of Dopant Atoms in Silicon by Microwave-Induced Rapid Heating with Wireless Carbon Heating Tubes

Masahiko Hasumi¹,

Toshiyuki Sameshima²,

R. Seki³

et al.

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Activation of Dopant Atoms in Silicon by Microwave-Induced Rapid Heating with Wireless Carbon Heating Tubes

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