Active Compensation Method of Nonlinear Error in Homodyne Laser Interferometer for Vibration Measurement

Puzhen, 张埔榛 Zhang; Jun, 吴军 Wu; Genghua, 黄庚华 Huang

doi:10.3788/lop55.081204

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2022

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“…Phase measurement of single-frequency laser interferometer belongs to optical intensity measurement, many internal (electronic noise and long-term drift, etc.) and external factors environmental changes, such as temperature, atmospheric pressure, refractive index changes will affect the measurement results [6,7].…”

Section: Introductionmentioning

confidence: 99%

Micro-Movement Measured by Laser Heterodyne Interferometer Based on Acousto-Optic Effect

et al. 2022

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In this experiment, the stable output of a dual-frequency laser source is obtained by an acousto-optic modulator due to the Bragg diffraction effect. Furthermore, the non-polarized dual-laser heterodyne interferometer is designed to measure the micro-movement of stacked piezoelectric (PZT) ceramic. This micro-movement can be dynamically determined by comparing the phase difference between the conference beam and measuring beam. The results indicate that the micro-movement of PZT ceramic changes linearly with the driven-voltage in the range of 0–30 V and the sensitivity of movement to voltage is 58.3 nm/V, which is very close to the theoretical value and this laser heterodyne interferometer can be applied for calibrating parameters of PZT ceramic.

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Section: Introductionmentioning

confidence: 99%