Active isolation of electronic micro-components with piezoelectrically transduced silicon MEMS devices

Abstract

Thin PZT films have a major interest for active control of mechanical structures. Precisely, it is an open field for the isolation of micro-components sensitive to dynamic effects. Indeed, the electronic components used, for example, in aircraft endure intense vibrations due to acceleration. These vibrations have some disturbing effects on the frequency stability and on the usable life of the electronic elements. The isolation of these elements becomes crucial to protect them from the vibrating environment. In order to manage this problem, it is advisable to isolate the electronic card either at the case level or at the card level or at the sensitive element level. The latter solution was chosen. Thus, we have direct access to the control electronics and the energy sources and the control energy is lower. An active suspension system is developed between the support and the sensitive element to be isolated. An original active suspension system is designed. Some modeling difficulties arise due to the existence of the inevitable bottom electrode common to the actuating layers and to the sensing layer.

Polar Oxide Thin Films for MEMS Applications

“…A further possible application is active damping of motion sensors. The same PZT film is used in the vibration sensor and the damping actuator [92,93]. Actuation of optical mirrors is a further possibility.…”

“…Displacements are of course small, but the response can be sufficient for sensor applications. Accelerometers [95] and the sensor part in active damping have been proposed [93]. Resonators in the thickness mode exhibit quite high frequencies in the lower GHz frequency region, where ordinary PZT has too high losses for applications [96].…”

Multi-modal wave propagation in smart structures with shunted piezoelectric patches

“…. In this sense, it can be proved that amplitudes (Q ref (1) , Q ref (2) ) of the modes reflected by the coupling element can be related to amplitudes (Q inc (1) , Q inc(2) ) of the modes incident to the coupling element via a diffusion matrix, namely C, which relates the reflection and transmission coefficients of the wave modes through the dynamical behavior of the coupling element:…”

“…Recently, a revolution has taken place in the field of integrated micro-electromechanical systems(MEMS) that offers new opportunities for smart structure design and optimization. The next generation of smart composite structures [1,2] is able to be created via the mechanical integration of active smart materials, electronics, chip sets and power supply systems. The material's intrinsic passive mechanical behavior can be controlled through electromechanical transducers in order to attain new desired functionalities [3].…”

Optimization of a passive structure for active vibration isolation: an interval-computation- and constraint-propagation-based approach

“…The best mechanical compromise can be obtained by using an active control process (Preumont 2002a, Meyer et al 2007a. Sky-hook control is the simplest and most common control strategy (Karnopp and Trikha 1969).…”