Active membrane in situ read-out by monolithic integration of silicon-based Mach-Zehnder interferometer

Gorecki, Christophe; Nieradko, Ł.; Sabac, Andreï; Jóźwik, Michał; Jackobelli, Alain; Dean, Thierry; Hoffman, R E; Bertz, A.

doi:10.1117/12.592237

Cited by 2 publications

(2 citation statements)

References 3 publications

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“…The phase change caused by slightly varying L 1opt might be as well produced by applying pressure on that branch. Changes in the effective refractive index of guided waves in a micro machined MZI have been characterized for the design of opto-mechanical pressure sensors 30 . In that work, a membrane-based sensor consisting of a piezoelectric transducer is integrated on the measuring branch of a MZI.…”

Section: Simulation Results For a Si-integrated Interferometer At 15mentioning

confidence: 99%

Group velocity control in multiple-beam and Mach-Zehnder interferometers

et al. 2010

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In this work, we demonstrate the existence of abnormal pulse propagation regimes in linear and passive multiple-beam interferometers, where the group velocity can be tuned from subluminal to superluminal values by simply changing the length of one of the interferometer's arms. Experiments are performed in the radiofrequency range by using coaxial transmission lines. The interferometers group delay is characterized both in the frequency and in the time domain. Group velocities of 2c and tunnelling with negative group velocity of -0.11c were measured for electromagnetic wave packets of 2 µs width travelling through a Mach-Zehnder interferometer. In a 4-beam interferometer, the group velocity of a 5 µs wide pulse was reduced to only 0.3c (compared to the usual value of 0.67c). The system is scalable to other frequency ranges and its implementation for narrowband optical pulses could be feasible by means of micromachining technologies. A scaling approach for advancing/delaying optical pulses at 1.55 µm is discussed. These systems are proposed as an alternative for controlling the group velocity without the need of using photonic crystals or periodically microstructuring, doping or using non-linear media.

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Section: Simulation Results For a Si-integrated Interferometer At 15mentioning

confidence: 99%

Group velocity control in multiple-beam and Mach-Zehnder interferometers

et al. 2010

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“…A fabrication procedure is proposed for SiO x N y buried channel waveguides, exhibiting low propagation loss, well-controlled refractive in-dex and low-internal stress. The design of such waveguide is optimised to be applied as a read-out of mechanical parameters in the MZI architecture, where the measuring branch is crossing the MEMS actuator and the rigid reference branch is outside of the actuator [15,16]. To obtain the optimal design 3D Beam Propagation Method (BPM) and Finite Element Method (FEM) have been performed, determining the modal analysis as well as the coupling efficiency and helping to define the consequences of elastooptic effects on MZI read-out.…”

Section: Introductionmentioning

confidence: 99%

Technology and performances of silicon oxynitride waveguides for optomechanical sensors fabricated by plasma-enhanced chemical vapour deposition

Sabac¹,

Gorecki²,

Jóźwik³

et al. 2007

J. Eur. Opt. Soc.-Rapid Publ.

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The technology and performance of micromachined channel waveguides, based on plasma-enhanced chemical vapour deposition (PECVD) of silicon oxynitride thin films, are presented. The deposition parameters of PECVD are studied in connection with their optical, mechanical and chemical properties. The design of the waveguide is optimised for single mode operation, low loss propagation and high efficiency of coupling to single mode optical fibers. This technology is applied to fabricate the pigtailed Mach-Zehnder interferometers, where the coupling from the optical fiber to the waveguide is based on U-groove etch, supporting fibers in the same substrate as the waveguide substrate.

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Active membrane in situ read-out by monolithic integration of silicon-based Mach-Zehnder interferometer

Cited by 2 publications

References 3 publications

Group velocity control in multiple-beam and Mach-Zehnder interferometers

Group velocity control in multiple-beam and Mach-Zehnder interferometers

Technology and performances of silicon oxynitride waveguides for optomechanical sensors fabricated by plasma-enhanced chemical vapour deposition

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