2024
DOI: 10.1038/s44172-024-00224-1
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Active optical phased array integrated within a micro-cantilever

Sylvain Guerber,
Daivid Fowler,
Laurent Mollard
et al.

Abstract: Three dimensional sensing is essential in order that machines may operate in and interact with complex dynamic environments. Solid-state beam scanning devices are seen as being key to achieving required system specifications in terms of sensing range, resolution, refresh rate and cost. Integrated optical phased arrays fabricated on silicon wafers are a potential solution, but demonstrated devices with system-level performance currently rely on expensive widely tunable source lasers. Here, we combine silicon ni… Show more

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