Actuation of resonant MEMS using short pulsed forces

The MEMS pulsed digital oscillator (PDO) below the Nyquist limit

“…(e) As a consequence of the damping losses in the MEMS resonator, and due to the presence of the 1-bit quantizer in the feedback loop, the oscillation frequency (f OSC ) as a function of the sampling ratio (f 0 /f S ) exhibits a 'fractalized' shape [2], very similar to a distorted version of the well-known devil's staircase fractal [4]. This effect has also been recently reported in a very similar circuit topology [3].…”

“…At the same time, it enormously simplifies both the MEMS and the circuit requirements for the implementation of the feedback signal. A recent work [3] extends the driving * Corresponding author. Tel.…”