2015
DOI: 10.1364/ol.40.000205
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Actuation profiles to form Zernike shapes with a thermal active mirror

Abstract: In EUV lithography, the absorption of EUV light causes wavefront distortion that deteriorates the imaging process. An adaptive optics system has been developed ["Adaptive optics to counteract thermal aberrations," Ph.D. thesis (TU Delft, 2013)] to correct for this distortion using an active mirror (AM). This AM is thermally actuated by absorbing an irradiance profile exposed by a projector onto the AM. Due to thermal conductivity and bimorph-like deformation of the AM, the relation between actuation profile an… Show more

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Cited by 17 publications
(6 citation statements)
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“…The two mirrors could be realized as adaptive optics lowering the round-trip loss and improving mode matching between the fundamental eigenmode of the cavity and the squeezed light or output field of the interferometer. First experiments on high-resolution adaptive optics based on thermally induced deformations using heater arrays in thermal contact with the optics [105], or by projecting images onto optics [141], have demonstrated the soundness of this approach. How much active technology can help to lower round-trip loss in filter cavities is unclear though.…”
Section: Active Optics Technologymentioning
confidence: 99%
“…The two mirrors could be realized as adaptive optics lowering the round-trip loss and improving mode matching between the fundamental eigenmode of the cavity and the squeezed light or output field of the interferometer. First experiments on high-resolution adaptive optics based on thermally induced deformations using heater arrays in thermal contact with the optics [105], or by projecting images onto optics [141], have demonstrated the soundness of this approach. How much active technology can help to lower round-trip loss in filter cavities is unclear though.…”
Section: Active Optics Technologymentioning
confidence: 99%
“…Lück et al achieved an almost ×38 decrease in the level of wave-front distortion. A somewhat similar approach was followed by Saathof et al [158,159], in which the correction was introduced by a deformable mirror, but thermally actuated by illumination with a predefined distributed light. This heating light was provided and formed using a video projector and the mirror placed between the reflective layer and the substrate, was covered with an absorptive layer that was heated by the light provided by the projector.…”
Section: Thermal Lens Studies Related To High-power Lasers and Solid To Materialsmentioning
confidence: 99%
“…The control objective is to keep the temperature distribution constant using the feedback information provided by the sensors. Similar control problems appear in various real-life applications, such as for example in control of thermally actuated deformable mirrors used in adaptive optics applications [55,56,57,58,59]. The temperature dynamics is governed by the 2D heat equation with constant parameters.…”
Section: Control Problem Formulationmentioning
confidence: 99%