TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference 2007
DOI: 10.1109/sensor.2007.4300368
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Adaptation for Frequency Focusing and Increased Sensitivity in Biomimetic Flow Sensors using Electrostatic Spring Softening

Abstract: This paper presents the results of active adaptation of sensor sensitivity. By applying a DC-bias voltage to the sensing electrodes of a cricket inspired artificial hair sensor the effective spring stiffness can be adapted resulting in a reduced resonance frequency and increased sensitivity. An array of flow sensors was actuated using electrical and acoustical signals at different values of the DC-bias voltage. Characterization was done using a scanning laser vibrometer. Both resonance frequency versus applied… Show more

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Cited by 5 publications
(6 citation statements)
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“…Here, we report the use of electrostatic spring softening (ESS) to increase the sensitivity and enhance the mechanical response of these sensors [20]. Previously, the possibility of ESS for flow sensors by dc-bias voltages was demonstrated using electrostatic actuation [21]. In this work, we show that ESS can be used to adaptively change the mechanical transfer function of the system.…”
Section: Introductionmentioning
confidence: 76%
“…Here, we report the use of electrostatic spring softening (ESS) to increase the sensitivity and enhance the mechanical response of these sensors [20]. Previously, the possibility of ESS for flow sensors by dc-bias voltages was demonstrated using electrostatic actuation [21]. In this work, we show that ESS can be used to adaptively change the mechanical transfer function of the system.…”
Section: Introductionmentioning
confidence: 76%
“…To increase the sensitivity and enhancing the mechanical transfer of these sensors, we make use of Electrostatic Spring Softening (ESS). Previously, the use of ESS was demonstrated for electrostatically actuated flow sensors [4]. In this work, we show that ESS is indeed applicable to adaptively change the electro-mechanical properties of the system for oscillating air flow perception.…”
Section: Introductionmentioning
confidence: 56%
“…Therefore next generation arrays will be fitted with lower hairdensity. This is a lesson that could be easily learned from studies of the cricket cerci as well since relative inter-hair distances seem to peak between 5 and 7 hair-diameters [34], as opposed to the 3 -5 hair-diameters of some of our previous designs [35].…”
Section: B Hair Density and Viscous Couplingmentioning
confidence: 87%