Abstract:In semiconductor manufacturing, it is important to produce multiple products on the same equipment to enhance the overall equipment effectiveness so as to improve the productivity. However, the "high-mix" production is difficult to control due to the time-varying model. To address this problem, an adaptive exponentially weighted moving average (EWMA) control method of which the core content is online dynamic modeling is put forward. During dynamic modeling process, the noise disturbance can be predicted throug… Show more
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