Adaptive laser shock micro-forming for MEMS device applications

Abstract

Laser shock micro-forming is a non-thermal laser forming method that uses laser-induced shockwave to modify surface properties and to adjust shapes and geometry of work pieces. The magnitude and spatial distribution of the laser-induced shockwaves depend on the energy profiles of the laser beam focused on sample surfaces. In this paper, we present an adaptive optical technique to engineer spatial profiles of laser beams to control the shapes, sizes, and locations of the laser-induced shockwaves and the resulting forming features. Using a spatial light modulator, this adaptive laser beam forming tool was used to process free-standing MEMS structures in aluminum, which has led to highly uniform forming features. Shockwave simultaneously excited by multiple laser beams generated by the spatial light modulator and its effects on the micro-forming process were also studied. The results presented in this paper show that the adaptive optics laser beam forming is an effective and flexible method to generate shockwave with various shapes and sizes of wavefront and at multiple locations for laser processing at microscales.

A Monolithic Gimbal Micro-Mirror Fabricated and Remotely Tuned with a Femtosecond Laser

“…To cope with these issues, laser-shock adjustment with short pulses has been proposed [6,7,8]. While still relying on linear absorption events, the use of short pulses lowers the timescale of interaction and minimizes thermal diffusion effects.…”