Adaptive Weighted Error-Correction Method Based on the Error Distribution Characteristics of Multi-Channel Alignment
Peiyu Song,
Weibo Wang,
Biwei Wu
et al.
Abstract:As process nodes of advanced integrated circuits continue to decrease below 10 nm, the requirement for overlay accuracy is becoming stricter. The alignment sensor measures the position of the alignment mark relative to the wafer; thus, sub-nanometer alignment position accuracy is vital. The Phase Grating Alignment (PGA) method is widely used due to its high precision and stability. However, the alignment error caused by the mark asymmetry is the key obstacle preventing PGA technology from achieving sub-nanomet… Show more
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