Add-on transmission attachments for the scanning electron microscope

Khursheed, Anjam; Karuppiah, N.; Osterberg, Mans; Thong, John T. L.

doi:10.1063/1.1529301

Cited by 11 publications

(3 citation statements)

References 4 publications

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“…At present, such materials identification via EELS – as illustrated in case study 4 – is only available from analytical TEMs or few SEMs with special spectrometer attachments operating in transmission mode. [ 37 ] The used acceleration voltages – typically 30–300 keV for TEMs and ≤30 keV for SEMs – restrict the material dependent sample thickness to meet the requirements for electron transparency and the multiplicity of scattering. [ 38 ] Here we note that the typical section thickness of 60–100 nm is still thin enough to find acceptable levels of multiple scattering in the low energy loss region of the spectra.…”

Section: Discussionmentioning

confidence: 99%

Deconstructing 3D Structured Materials by Modern Ultramicrotomy for Multimodal Imaging and Volume Analysis across Length Scales

Wacker,

Curticean,

Ryklin

et al. 2023

Adv Funct Materials

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Based on the rapid advances in additive manufacturing, micro‐patterned heterostructures of soft materials have become available that need to be characterized down to the nanoscale. Advanced function‐structure relationships are designed by direct 3D structuring of the object and – in the future – fine control over material functionality in 3D will produce complex functional objects. To control their design, fabrication and final structure, morphological and spectroscopical imaging in 3D at nanometer resolution are critically required. With examples of carbon‐based objects, it is demonstrated how serial ultramicrotomy, that is, cutting a large number of successive ultrathin sections, can be utilized to gain access to the interior of 3D objects. Array tomography, hierarchical imaging and correlative light and electron microscopy can bridge length scales over several orders of magnitude and provide multimodal information of the sample's inner structure. Morphology data derived from scanning electron microscopy are correlated with spectroscopy in analytical transmission electron microscopy and probe microscopy at nanometer resolution, using TEM‐electron energy loss spectroscopy and infrared‐scanning‐near‐field microscopy. The correlation of different imaging modalities and spectroscopy of carbon‐based materials in 3D provides a powerful toolbox of complementary techniques for understanding emerging functions from nanoscopic structuring.

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Section: Discussionmentioning

confidence: 99%

Deconstructing 3D Structured Materials by Modern Ultramicrotomy for Multimodal Imaging and Volume Analysis across Length Scales

Wacker,

Curticean,

Ryklin

et al. 2023

Adv Funct Materials

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“…While not entirely new, the resurgence is due in part to recent detector technology advances. Combined sample holder/detectors as well as stand-alone segmented detectors, similar to those used in conventional high-energy scanning transmission electron microscopy (STEM) [2–6], lie at the heart of these advances. In fact, all major SEM manufacturers and accessory vendors now offer various STEM detectors as optional add-ons.…”

Section: Introductionmentioning

confidence: 99%

Acceptance Angle Control for Improved Transmission Imaging in an SEM

Holm

Keller

2017

Micros. Today

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This contribution presents a simple, cost-effective modular aperture system enabling comprehensive acceptance angle control for STEM-in-SEM imaging. The system is briefly described, and different ways to use it are explained. To demonstrate the utility of the approach, a few samples are examined using the new system with comparisons to images from traditional SEM detectors. We show that the system enables conventional STEM imaging modes ranging from brightfield to high-angle annular darkfield (that is, Z-contrast), thin annular detection schemes, and even some non-conventional imaging modes.

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“…The idea was already described by Ardenne in the 1930s and put into practice in the 1960s and 1970s [3][4][5][6]. It has been applied successfully for dimensional metrology of x-ray photomasks [7,8], and further developments lead to applications like electron energy loss spectroscopy (EELS) [9] and 'wet-STEM' enabling the observation of objects in liquids [10].…”

Section: Introductionmentioning

confidence: 99%

Characterization of nanoparticles by scanning electron microscopy in transmission mode

Buhr¹,

Senftleben²,

Klein³

et al. 2009

Meas. Sci. Technol.

106

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A conventional scanning electron microscope operated in transmission mode (TSEM) was used for imaging silica, gold and latex nanoparticles. Particles were applied to conventional transmission electron microscope (TEM) grids with different supporting films. A semiconductor detector capable of accomplishing both bright-field and dark-field imaging was used to record transmitted electrons. Particle diameter was determined from the images by comparing measured data with the results of corresponding Monte Carlo simulations which took into account particle and instrument properties. Measured and simulated line profiles agreed well; the method is sensitive to changes in diameter in the nano- and sub-nanometre range. It is concluded that TSEM imaging is a promising tool for dimensional characterization of nanoparticles. Necessary extensions to the technique in order to achieve traceable measurements are discussed.

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Add-on transmission attachments for the scanning electron microscope

Cited by 11 publications

References 4 publications

Deconstructing 3D Structured Materials by Modern Ultramicrotomy for Multimodal Imaging and Volume Analysis across Length Scales

Deconstructing 3D Structured Materials by Modern Ultramicrotomy for Multimodal Imaging and Volume Analysis across Length Scales

Acceptance Angle Control for Improved Transmission Imaging in an SEM

Characterization of nanoparticles by scanning electron microscopy in transmission mode

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