Adding colors to polydimethylsiloxane by embedding vertical silicon nanowires

The authors report the fabrication and optical characterization of fully suspended, transferrable, and deflectable silicon photonic crystal nanomembranes. Starting with a silicon-on-insulator wafer, the authors used electron beam lithography and inductively coupled plasma reactive ion etching (ICP-RIE) to introduce various photonic crystal patterns in silicon. A membrane containing the photonic crystal patterns was then defined by photolithography combined with ICP-RIE and released from the handle wafer by wet chemical etching. Finally, a free-standing photonic crystal membrane was obtained by a wet transfer and alignment process over a perforated foreign substrate. In the fabricated structures, the authors observed vivid structural colors in dark-field optical images of square lattice photonic crystals and measured a guided resonance mode with a quality factor as high as 5600 in a novel slot-graphite photonic crystal.

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“…The tunable structural colors observed here will be useful for applications such as color filters 21 …”

Section: A Structural Colormentioning

confidence: 94%

Fabrication of transferrable, fully suspended silicon photonic crystal nanomembranes exhibiting vivid structural color and high-Q guided resonance

Lin¹,

Martínez²,

Povinelli³

2013

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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“…Products of their polymerization-polysilanes and polysiloxanes-that contain Si-Si or Si-O-Si fragments possess a number of practically attractive chemical and physical properties [1][2][3][4][5]. Volatile organosilicon compounds are also famous as CVD (chemical vapor deposition) precursors for the production of silicon-containing films and ceramics [6][7][8][9][10].…”

Section: Introductionmentioning

confidence: 99%

Thermal properties of some organosilicon precursors for chemical vapor deposition

Ermakova

Сысоев

Nikolaev

et al. 2016

J Therm Anal Calorim

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Five volatile organosilicon compounds: trimethyl (phenyl)silane Me 3 SiC 6 H 5 (I), trimethyl(cyclohexyl)silane Me 3 SiC 6 H 11 (II), trimethyl(phenoxy)silane Me 3 SiOC 6 H 5 (III), trimethyl(cyclohexyloxy)silane Me 3 SiOC 6 H 11 (IV), and trimethyl(allyloxy)silane Me 3 SiOC 3 H 5 (V) were synthesized, purified, and identified. Data of IR spectroscopy; gas-liquid chromatography; and 1 H NMR, 13 C NMR, 29 Si NMR analyses were used to identify and confirm the high purity of the compounds (more than 99.6 %). The thermal stability of the compounds was investigated by DTA-TG. The quantitative data on temperature dependences of the saturated vapor pressure of the compounds were obtained by static tensimetry method with glass membrane null manometer. The volatilities of compounds Me 3 SiOC 6 H 5 , Me 3 SiC 6 H 5 , Me 3 SiC 6 H 11 , Me 3 SiOC 6 H 11 were shown to be close due to the presence of large-size phenyl/cyclohexyl group. The replacement of phenyl/cyclohexyl group by allyl substituent in the molecule led to significant increase in volatility for Me 3 SiOC 3 H 5 in comparison with compounds mentioned before. The vapor pressure of all of the compounds is enough to use them as precursors in CVD processes without additional heating. The thermodynamic parameters (enthalpies and entropies) of vaporization processes for four compounds II-V were determined for the first time.

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“…The mode's spatial distribution depends on nanowire radius, meaning that the transmission spectrum displays a dip whose position is determined by the nanowire radius [3,4]. Here, we use this property to realize a filter array for multispectral imaging.…”

mentioning

confidence: 95%

“…1(a) shows the schematic representation of our multispectral imaging system. It was recently demonstrated that vertical silicon nanowires show vivid colors, a consequence of the wavelength-dependence of the spatial distribution of the nanowire's waveguide mode, which modifies the coupling of the incident light to the mode [3, 4].The mode's spatial distribution depends on nanowire radius, meaning that the transmission spectrum displays a dip whose position is determined by the nanowire radius [3,4]. Here, we use this property to realize a filter array for multispectral imaging.…”

mentioning

confidence: 99%

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Multispectral Imaging using Polydimethylsiloxane (PDMS) Embedded Vertical Silicon Nanowires

Park

Crozier

2013

Cleo: 2013

Self Cite

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We demonstrate the use of vertical silicon nanowires for multispectral imaging. The eight filter functions of our filter array are defined in a single lithography step. We show both visible color and near-infrared imaging.OCIS codes: (110.4234) Multispectral and hyperspectral imaging; (220.4241) Nanostructure fabrication Multispectral imaging divides the spectrum into many bands, permitting materials and objects in a scene to be identified from their absorption or reflection characteristics. Multispectral imaging is used in many applications, including remote sensing [1] and food quality control [2]. However, most conventional multispectral imaging devices are expensive and bulky because they use motorized filter wheels or multiple cameras. Here we develop a compact multispectral image system using polydimethylsiloxane (PDMS) embedded vertical silicon nanowires. The system is based on filter array with eight different spectral bands and a reference channel. All filter functions are defined in a single lithography step, and cover visible to near-infrared (NIR) wavelengths. By attaching the device to a monochrome image sensor, we successfully demonstrate a compact multispectral imaging system. Figure 1 (a) Concept schematic of multispectral image system. (b) Fabrication steps for multispectral filter.Fig. 1(a) shows the schematic representation of our multispectral imaging system. It was recently demonstrated that vertical silicon nanowires show vivid colors, a consequence of the wavelength-dependence of the spatial distribution of the nanowire's waveguide mode, which modifies the coupling of the incident light to the mode [3, 4].The mode's spatial distribution depends on nanowire radius, meaning that the transmission spectrum displays a dip whose position is determined by the nanowire radius [3,4]. Here, we use this property to realize a filter array for multispectral imaging. The unit cell of the filter array contains eight different filters, each comprising nanowires of a particular radius. The unit cell also contains a transparent region in its center. The fabrication process [4] starts with a silicon wafer. (Fig. 1(b)) PMMA resist is spun-coated on the wafer and e-beam lithography is performed. An aluminum etch mask is fabricated using evaporation and the lift-off process. The wafer is then dry etched. The fabricated vertical silicon nanowires are 1.67 µm tall and on a pitch of 1 µm. PDMS (base and curing agent ratio 5:1) is then spun cast onto the etched wafer and cured (230 °C). The PDMS film is then mechanically cut from the substrate with a razor blade. After fabrication, devices are mounted on a monochrome image sensor. Fig. 2(a) shows a scanning electron microscope (SEM) image of the etched vertical silicon nanowires. Nanowires with eight different radii (45 nm to 80 nm in 5 nm steps) are fabricated. The array contains 20 × 20 unit cells. The unit cell is 75 × 75 µm and contains eight different filters. Each filter comprises 24 × 24 nanowires and corresponds to 4 × 4 pixels of the image sensor. The nanow...

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Adding colors to polydimethylsiloxane by embedding vertical silicon nanowires

Cited by 47 publications

References 20 publications

Fabrication of transferrable, fully suspended silicon photonic crystal nanomembranes exhibiting vivid structural color and high-Q guided resonance

Fabrication of transferrable, fully suspended silicon photonic crystal nanomembranes exhibiting vivid structural color and high-Q guided resonance

Thermal properties of some organosilicon precursors for chemical vapor deposition

Multispectral Imaging using Polydimethylsiloxane (PDMS) Embedded Vertical Silicon Nanowires

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