Additive Manufacturing Design and Fabrication of Ceramic Cylindrical Ion Trap Mass Analyzer Chips for Miniaturized Mass Spectrometer Smart-Device (Internet of Things) Applications

Abstract

The current computing power and network capabilities of handheld smart devices is helping to drive the development of new sensors, enabling the Internet of things. A chip-based mass spectrometer technology promises to offer a smart-device autonomous microsystem chemical analysis capability for sample determination and process monitoring for multiple applications in a small low-power instrument package. This project focuses on the development of cylindrical ion trap (CIT) mass analyzer chips fabricated using three-dimensional (3-D) additive manufacturing (AM) and planar low temperature cofired ceramic thick film processes for a chip-based mass spectrometer microsystem. The CIT is a mass analyzer composed of planar electrodes and operates by trapping and ejecting sample ions based on their mass in a radiofrequency field. Because of its simplicity, CITs may be easily miniaturized and connected in tandem to achieve multiplexing. AM materials and methods enable enhanced trap miniaturization through micromachining and electrode patterning methods, fast and cost-effective prototyping, batch fabrication, and material formulation flexibility. The current design incorporates three parallel ceramic plate metalized electrodes making up a singular trap geometry in a 10-mm2 ceramic chip, forming a mass analyzer of reduced size, mass, and power, with enhanced material robustness for extended range use and in harsh environments. Unique processes have been developed to produce these devices which include conformal metallization layers, adhesion layers, ceramic paste formulations, sacrificial supporting materials, and cofiring methods. Additionally, 3-D printing brings a unique design and fabrication capability enabling novel structures, material blending, and heterogeneous integration. With true digital control, the designs are easily scalable and shape agnostic.

Mesoscale Ceramic Cylindrical Ion Trap Mass Analyzers For In Situ Sample Analysis

“…The most significant finding is the ion detection efficiency from the notched geometry and the effect on trap performance. CIT geometry [26,44]. CITs on the mesoscale (100um to 5mm) offer a larger size ion trapping volume and increased sensitivity versus micro scale ion traps.…”

“…The significance of this result is that it is the first mass spectrum of a complete CIT made in full co-fired metallized ceramic material system. Thus proving the concept of electronic packaging material systems for batch fabricated CIT chip device application to the field of miniature mass spectrometry [44].…”

“…While the SS CIT electrode structure is a rather simple parallel plate structure, the ceramic CIT device employs a more complicated design taking advantage of the LTCC material system fabrication methods to design a reduced area and capacitance electrode structure, figures 5.7 and 5.8, to minimize device power consumption. While this design and fabrication method proved functional for the CIT devices, it also facilitates the batch fabrication of CIT chips for "consumable" miniature mass spectrometer applications, and is the first CIT produced using this method [44].…”