Green supply chain management (GSCM) has been applied by semiconductor firms to ameliorate environmental problems. This study aims to evaluate the green performance of semiconductor supply chains to examine the effect of GSCM. Using the meta‐frontier Malmquist productivity index as the research method, and a sample of global semiconductor firms consisting of three groups, design, manufacturing, and assembling, as research objects, this study evaluates variation in performance while considering environmental variables and disregarding environmental variables respectively, and compares the differences between those two conditions for the whole supply chain and each group in the supply chain. This study discovers no significant differences in both considering and disregarding environmental variables scenarios, productivity of the whole supply chain shows progress. This study found the investment in enhancing technology development as a more important factor in productivity improvement and identifies design as the global leading sub‐industry in the semiconductor supply chain.