“…The atomic ratio (O/Si) was gradually increased with the deposition temperature increasing and was saturated to about 1.98 as the substrate temperature reached 70 • C. Moreover, though the atomic concentration of the elemental nitrogen introduced into the films was limited in the range of 1.12 at.%-1.38 at.%, the atomic ratio of N/C for the samples deposited at a temperature of 70 • C was markedly increased from 0.77 to 1.84 as the SiO x N y film synthesized at 120 • C. This showed evidence of the deposition temperature being beneficial for the introduction of the nitrogen atoms and also for the decomposition of TMS precursor to cause a decrease in the carbon atoms in the synthesized films. Figure 4a-d highlights the narrow scan of Si 2p, O 1s, N 1s, and C 1s core levels for the SiO x N y films deposited at the substrate temperatures of 70 and 120 • C. In Figure 4a, the peak of the Si 2p core level for the SiO x N y films deposited at 70 • C was located at 103.8 eV, while that of the film deposited at 120 • C shifted to 103.5 eV, which corresponded well to the Si-O-Si chemical bond in the SiO x matrix [22,23]. The shift of the Si 2p peak toward a higher binding energy for the SiO x N y films deposited at 70 • C was attributed to the signal that emerged from the Si atoms, which was surrounded by the undissociated oxygen molecule (i.e., oxygen-rich condition) [24,25].…”