28th International Spring Seminar on Electronics Technology: Meeting the Challenges of Electronics Technology Progress, 2005.
DOI: 10.1109/isse.2005.1491047
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Adhesion of polymer/metal bonds for molded interconnect devices (MID)

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Cited by 4 publications
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“…In later processing, a thick layer of SU-8 epoxy, which will act as a membrane, was deposited on the thermopile structure figure 2(c). A short oxygen plasma etch was performed in order to enhance the adhesion between the SU-8 and the metals [19].…”
Section: Fabrication Of the Detectormentioning
confidence: 99%
“…In later processing, a thick layer of SU-8 epoxy, which will act as a membrane, was deposited on the thermopile structure figure 2(c). A short oxygen plasma etch was performed in order to enhance the adhesion between the SU-8 and the metals [19].…”
Section: Fabrication Of the Detectormentioning
confidence: 99%
“…Investigations into laser patterning technologies on 3D-MID and surface-mount devices (SMD) and bare die assembling with different substrates were conducted [6]. Adhesive strength between polymer and metals was studied with surface improvement by plasma treatment [7]. Investigation on deposition of a Cu/Cr layer on thermoplastic substrates was carried out with different plasma pretreatment processes.…”
Section: Introductionmentioning
confidence: 99%