2016
DOI: 10.1166/jnn.2016.12596
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Adhesion Property Between Cu, Ti Metal and SU-8, AZ 4620 Polymer Dielectric

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“…However, the interface bonding between a polymer and silicon (Si) or metal is poor, especially between a polymer and metal. When using polymer to fabricate microstructures or microdevices on a metal substrate, the adhesion strength between the polymer and substrate is much lower than that on the Si substrate [ 19 ], which will have a great impact on the final quality and performance of the designed structure. The polymer and substrate are prone to bond failure due to the poor adhesion performance between the polymer and metal materials.…”
Section: Introductionmentioning
confidence: 99%
“…However, the interface bonding between a polymer and silicon (Si) or metal is poor, especially between a polymer and metal. When using polymer to fabricate microstructures or microdevices on a metal substrate, the adhesion strength between the polymer and substrate is much lower than that on the Si substrate [ 19 ], which will have a great impact on the final quality and performance of the designed structure. The polymer and substrate are prone to bond failure due to the poor adhesion performance between the polymer and metal materials.…”
Section: Introductionmentioning
confidence: 99%