Abstract:For the first time, the possibility of creating a multilayer system metal (Al, Cr, In, Mo, and W) silicon–carbon coating was studied. A silicon–carbon film was synthesized from a polyorganosiloxane polymer containing an active Si–O siloxane group. Due to the use of furnace pyrolysis, in which the purge gas continuously removes the polymer thermal degradation products from the system, it was possible to reduce the film formation temperature to 300 °C. According to the energy dispersive analysis data, silicon–ca… Show more
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