Adhesive-Layer-Free and Double-Faced Nanotransfer Lithography for a Flexible Large-Area MetaSurface Hologram

Zhao, Zhi‐Jun; Hwang, Sung Hwan; Kang, Hyeok-Joong; Jeon, Sohee; Bok, Moonjeong; Ahn, Seoyeon; Im, Dajeong; Hahn, Joonku; Kim, Hwi; Jeong, Jun‐Ho

doi:10.1021/acsami.9b14345

Cited by 17 publications

(25 citation statements)

References 47 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…However, it was reduced to 14% under 3 bar of pressure. Therefore, we can conclude that the pressure, heating time, and heating temperature have significant effects on the controllability of the nanogaps; this phenomenon is consistent with the results of previous studies , (when heated above their T g, PMMA resin and films deform depending on the applied pressure, heating temperature, and heating time). In addition, the detail experimental conditions of the fabricated nanogaps are provided in Table S1.…”

Section: Resultssupporting

confidence: 92%

Large-Area Nanogap-Controlled 3D Nanoarchitectures Fabricated via Layer-by-Layer Nanoimprint

et al. 2021

Self Cite

View full text Add to dashboard Cite

The fabrication of large-area and flexible nanostructures currently presents various challenges related to the special requirements for 3D multilayer nanostructures, ultrasmall nanogaps, and size-controlled nanomeshes. To overcome these rigorous challenges, a simple method for fabricating wafer-scale, ultrasmall nanogaps on a flexible substrate using a temperature above the glass transition temperature (Tg) of the substrate and by layer-by-layer nanoimprinting is proposed here. The size of the nanogaps can be easily controlled by adjusting the pressure, heating time, and heating temperature. In addition, 3D multilayer nanostructures and nanocomposites with 2, 3, 5, 7, and 20 layers were fabricated using this method. The fabricated nanogaps with sizes ranging from approximately 1 to 40 nm were observed via high-resolution transmission electron microscopy (HRTEM). The multilayered nanostructures were evaluated using focused ion beam (FIB) technology. Compared with conventional methods, our method could not only easily control the size of the nanogaps on the flexible large-area substrate but could also achieve fast, simple, and cost-effective fabrication of 3D multilayer nanostructures and nanocomposites without any post-treatment. Moreover, a transparent electrode and nanoheater were fabricated and evaluated. Finally, surface-enhanced Raman scattering substrates with different nanogaps were evaluated using rhodamine 6G. In conclusion, it is believed that the proposed method can solve the problems related to the high requirements of nanofabrication and can be applied in the detection of small molecules and for manufacturing flexible electronics and soft actuators.

show abstract

Section: Resultssupporting

confidence: 92%

Large-Area Nanogap-Controlled 3D Nanoarchitectures Fabricated via Layer-by-Layer Nanoimprint

et al. 2021

Self Cite

View full text Add to dashboard Cite

show abstract

“…Heterogeneous nanostructures, unique nanoarchitecture with bi- or multimetallic construction, have gained considerable attention in the development of catalysts, , sensors, − transistors, nanogenerators, photovoltaic devices, batteries, metasurfaces, , and plasmonic structures. , In these devices, the core elements with unprecedented performance are nano-manufactured functional materials, such as nanoparticles, nanorods, nanowires, nanopillars, nanoboxes, and nanoribbons, whose physical properties and functions are fundamentally different from those of the bulk materials. , In particular, the combination of unique nanostructures and multiple noble metal construction provides enhanced catalytic properties and optical properties. For example, several studies have reported reliable and sensitive gas sensors based on heterogeneous nanowires with various noble-metal (e.g., Ag, Au) catalysts. − Additionally, various other noble metal-based heterogeneous nanostructures with ultra-small nanogaps (including nanoparticles, nanopillars, nanoboxes) have been extensively fabricated.…”

Section: Introductionmentioning

confidence: 99%

“…Heterogeneous nanostructures, unique nanoarchitecture with bi-or multimetallic construction, have gained considerable attention in the development of catalysts, 1,2 sensors, 3−5 transistors, 6 nanogenerators, 7 photovoltaic devices, 8 batteries, 9 metasurfaces, 10,11 and plasmonic structures. 12,13 In these devices, the core elements with unprecedented performance are nano-manufactured functional materials, such as nanoparticles, nanorods, nanowires, nanopillars, nanoboxes, and nanoribbons, whose physical properties and functions are fundamentally different from those of the bulk materials.…”

Section: ■ Introductionmentioning

confidence: 99%

Shape-Controlled and Well-Arrayed Heterogeneous Nanostructures via Melting Point Modulation at the Nanoscale

Zhao

Ahn

et al. 2020

ACS Appl. Mater. Interfaces

Self Cite

View full text Add to dashboard Cite

A novel method for fabricating shape-controlled and well-arrayed heterogeneous nanostructures by altering the melting point of the metal thin film at the nanoscale is proposed. Silver nanofilms (AgNFs) are transformed into silver nanoislands (AgNIs), silver nanoparticles (AgNPs), and silver nanogaps (AgNGs) that are well-ordered and repositioned inside the gold nanoholes (AuNHs) depending on the diameter of the AuNHs, the thickness of the AgNF, and the heating temperature (120–200 °C). This method demonstrates the ability to fabricate uniform, stable, and unique structures with a fast, simple, and mass-producible process. For demonstrating the diverse applicability of the developed structures, high-density AgNGs inside the AuNHs are utilized as surface-enhanced Raman spectroscopy (SERS) substrates. These AgNGs-based SERS substrates exhibit a performance enhancement, which is 1.06 × 106 times greater than that of a metal film, with a relative standard deviation of 19.8%. The developed AgNP/AgNI structures are also used as nonreproducible anti-counterfeiting signs, and the anti-counterfeiting/readout system is demonstrated via image processing. Therefore, our method could play a vital role in the nanofabrication of high-demand nanostructures.

show abstract

“…In addition, multilayer stacks can offer new emergent properties by taking advantage of the behavior of collective materials, which would have broad impact on catalysis, energy, medicine, and optics. − The complicated and costly lithographic fabrication techniques and other direct-write techniques allow for nanofabricating layered structures with precise component registry and alignment. However, these top-down fabrication techniques are time-consuming, limited to small areas, and not readily amenable for the dynamic, tunable, or soft materials required for many applications. , Building nanostructures from bottom-up fabrication techniques, − such as layer-by-layer (LbL) deposition, utilizing self-assembly approach techniques has enabled high nanoscale precision fabrication at a massively parallel scale with low cost.…”

Section: Introductionmentioning

confidence: 99%

Tunable Optical Property of Plasmonic–Polymer Nanocomposites Composed of Multilayer Nanocrystal Arrays Stacked in a Homogeneous Polymer Matrix

Jhang

Wang

et al. 2020

ACS Appl. Mater. Interfaces

View full text Add to dashboard Cite

Layer-by-layer (LbL) synthetic technique has been used to deposit multilayers composed of a wide range of materials including polymers, colloidal particles, and biomolecules. A more complex organization of nanocomponentswithin layers (intralayer) and across layers (interlayer)beyond simple deposition is required for manufacturing next-generation materials and devices. Recently, LbL was used to fabricate multilayer stacked polymer–nanocrystal nanocomposites composed of a stacking sequence of two immiscible polymer thin films. However, the requirement of two immiscible polymers limits its widespread use for the fabrication of various nanocomposites. Here, we presented a new and simplified synthetic method for the fabrication of multilayer stacked nanocomposites composed of multilayer plasmonic nanocrystal arrays stacked in a homogeneous polymer matrix via iterative sequential LbL deposition of polymer thin films and nanocrystal arrays. This novel fabrication technique requires strong attractive interaction between the “ligand shell” on the nanocrystal surface and the polymer matrix [Flory–Huggins interaction parameter of the ligand shell–polymer matrix (χ) < 0], which can dramatically enhance the stability of nanocomposites during the LbL deposition. The optical properties of plasmonic nanocomposites can be manipulated by the adjustment of the intrinsic property of the nanocrystal and/or coupling effect between adjacent nanocrystals from the same layer (intralayer) and/or the neighboring layer (interlayer). Taking advantage of this novel LbL fabrication technique, the properties of multilayer plasmonic nanocrystal arrays stacked in a homogeneous matrix can be manipulated via tuning the interlayer or intralayer coupling between nanocrystals, which can be achieved by sophisticated control of the packing density of two-dimensional nanocrystal arrays in each individual layer or the thickness of the polymer thin film between two adjacent nanocrystal arrays, respectively. These results provide a facile and effective way of designing a more complex multilayer nanostructure with controllable properties in a homogeneous polymer matrix.

show abstract

Adhesive-Layer-Free and Double-Faced Nanotransfer Lithography for a Flexible Large-Area MetaSurface Hologram

Cited by 17 publications

References 47 publications

Large-Area Nanogap-Controlled 3D Nanoarchitectures Fabricated via Layer-by-Layer Nanoimprint

Large-Area Nanogap-Controlled 3D Nanoarchitectures Fabricated via Layer-by-Layer Nanoimprint

Shape-Controlled and Well-Arrayed Heterogeneous Nanostructures via Melting Point Modulation at the Nanoscale

Tunable Optical Property of Plasmonic–Polymer Nanocomposites Composed of Multilayer Nanocrystal Arrays Stacked in a Homogeneous Polymer Matrix

Contact Info

Product

Resources

About