Adhesive Workpiece Fixturing for Micromachining

Abstract

Abstract. Even though significant progress has been made in the field of micro production and the development of miniaturized micro production-machines in the last ten years, an explicit consideration of clamping-devices has not taken place. The requirements for clamping technology in the manufacturing of microparts and the manufacturing of macroscale parts are highly different. Special clamping devices for each sector are needed. This article presents the designing of a special adhesive micro-clamping device for micro production. The clamping force is applied by fixing the workpiece to the clamping module using hot melt adhesives. Thus high surface pressure and damage to the microcomponent is avoided. The development of this adhesive clamping device is a first implementation of a novel and promising approach for micro production. Basic functioning could be confirmed by practical tests.

Microclamping principles from the perspective of micrometrology – A review

“…Two special clamping methods that we categorized as "mechanical" are molding workpieces in low-melting metals and the use of magnetorheological fluids which solidify if a magnetic field is activated [55,56].…”

“…For example, UV curable pressure-sensitive adhesives can clamp and release wafers for dicing [57]. Thermal glues solidify at room temperature and survive numerous cycles of solidification-liquefaction [3,55]. Dröder et.…”

“…They can clamp all materials except for porous objects. Their disadvantages are the small effective areas [55] and the poor scalability of the clamping force, which may even harm the workpiece. Vacuum suckers are inexpensive [70], moderately precise [45,71] and may offer limited self-alignment (e.g.…”