“…Current‐voltage (I‐V) characteristics, performed after the removal of the GaAs layer, demonstrated, in all the investigated samples, the formation of the buried junctions with good rectification properties : in this work the attention will be focused on two samples, labelled as 19‐630 and 20‐660, the only ones where AS investigation revealed the double acceptor levels . Moreover on these samples capacitance‐voltage (C‐V) investigation showed the widest thicknesses of the space charge region (SCR), around 1–2 μm, and the lowest apparent free carrier densities, below 10 16 cm −3 , with respect to those measured in the other junctions . The samples differ for the Zn doping of the overgrown GaAs and for details of the post‐growth annealing process; in particular, the sample 19‐630, characterized by a Zn doping of the GaAs layer of 1 × 10 19 cm −3 , was submitted to a post‐grown annealing of 2 h at a temperature of 630 °C; while the sample 20‐660 was obtained by a 1 × 10 20 cm −3 Zn‐doped GaAs layer and treated for 2 h at 660 °C.…”