“…9,[18][19][20][21] Micro-electro-mechanical systems (MEMS) sensors coated with thin lms consisting of different MOFs such as ZIF-8 (ZIF, zeolitic imidazolate framework; ZIF-8 ¼ Zn[2-methylimidazolate] 2 ) and HKUST-1 (HKUST, Hong Kong University of Science and Technology; HKUST-1, Cu 3 [benzentricarboxylate] 2 [H 2 O] 3 ) have been shown to successfully respond to water, alcohols and other VOCs, with sensitivity limits that exceed other mass-sensitive sensors. 22,23 However, several challenges remain, including improving the ease of receptor layer preparation, selectivity, sensitivity and response time. 24,25 Oen, parameters act against one another; e.g., a thicker lm may lead to increased sensitivity but at the cost of response time, owing to the time taken for analytes to diffuse through the MOF.…”