Advanced Back-Illuminated Silicon Photomultipliers With Surrounding P+ Trench

Hu, Hesuan; Wang, Ying; Liu, Penghao; Qin, Xiubo; Fang, Junpeng; Zhao, Hongming; Ma, Zhe; Wei, Jiatong

doi:10.1109/jsen.2022.3188692

Cited by 1 publication

(1 citation statement)

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“…For the conventional front-illuminated SiPM, the incoming photons are incident on the planar surface coated by ARC, being on the same side as the avalanche regions (high electrical field regions). In contrast, for the back-illuminated SiPM, the incoming photons fall on the detector side opposite to the avalanche regions 22 – 24 . The multilayer ARC on textured surface developed in this work is designed on the detector side of back-illuminated SiPM shown in Fig.…”

Section: Discussionmentioning

confidence: 99%

Advanced antireflection for back-illuminated silicon photomultipliers to detect faint light

Tao

Rajapakse

Erickson

2022

Sci Rep

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Silicon photomultipliers have attracted increasing attention for detecting low-density light in both scientific research and practical applications in recent years; yet the photon losses due to reflection on the light-sensitive planar silicon surface considerably limit its photon detection efficiency. Here we demonstrate an advanced light trapping feature by developing the multi-layer antireflection coatings and the textured silicon surface with upright random nano-micro pyramids, which significantly reduces the reflection of faint light in a wide spectrum, from ultraviolet to infrared. Integrating this advanced photon confinement feature into next-generation back-illuminated silicon photomultiplier would increase the photon detection efficiency with significantly lower reflection and much more active areas. This advanced design feature offers the back-illuminated silicon photomultiplier broader application opportunities exemplified in the emerging scenarios such as nuclear medical imaging, light detection and ranging for autonomous driving, detection of scintillation light in ionizing radiation, as well as high energy physics.

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Section: Discussionmentioning

confidence: 99%