2012
DOI: 10.1017/s1759078712000311
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Advanced characterization of a W-band phase shifter based on liquid crystals and MEMS technology

Abstract: In this paper, we present a continuously tunable phase shifter realized in MEMS technology. Varactors with liquid crystal as a tunable dielectric layer underneath gold bridges are used to build a loaded line phase shifter. Measurements show that the phase shifter has a differential phase shift of 928, a figure of merit (FoM) of 428/dB and an input matching of 219 dB at 76 GHz.The tuning speed of the phase shifter is measured at different temperatures between 10 and 508C. The realized phase shifter can be used … Show more

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Cited by 17 publications
(10 citation statements)
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“…11 and 12. As summarized in Table II, our design presents a tangible improvement in the overall performance when compared with that of a recent work [5].…”
Section: B Connector Compensation and Whole Device Performancementioning
confidence: 86%
“…11 and 12. As summarized in Table II, our design presents a tangible improvement in the overall performance when compared with that of a recent work [5].…”
Section: B Connector Compensation and Whole Device Performancementioning
confidence: 86%
“…Investigations of the transient behavior of this loaded-line phase shifter in MEMS technology is shown in Figure 29, where the rise and decay of the measured differential phase shift with respect to its maximum 8 for hLC in between 4.5 and 5 µm. This concept was proposed for the first time in [267,268] and realized in the W-band. The CPW line was processed on a 300 µm thick fused silica substrate, where the ground planes are made of a 5 µm thick gold layer, while the signal line is made of a 600 nm thick multi-metal Ti-TiN-Al-Ti-TiN layer with a 150 nm thick gold layer on top, creating a floating metal bridge.…”
Section: Bottom Substratementioning
confidence: 99%
“…, and the effective loss tangent, [28], of the delay section were also computed using (6) in conjunction with the measurement data for the two sets of the thru and line in Fig. 3 and they are shown in Fig.…”
Section: S-parameters Of Transitionsmentioning
confidence: 99%
“…where is defined by (6). In (9), corresponding to represents the wave phase constant in the LC layer.…”
Section: A Extraction Techniquementioning
confidence: 99%