Advanced deflector elements for high-throughput electron optical systems

Kienzle, O.; Knippelmeyer, Rainer; Claus, Wilfried; Matijevic, M.; Ehrhardt, Lars; Rau, Wolf D.; Orchowski, Alexander

doi:10.1117/12.472332

Emerging Lithographic Technologies VI 2002

DOI: 10.1117/12.472332

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Advanced deflector elements for high-throughput electron optical systems

O. Kienzle¹,

Rainer Knippelmeyer²,

Wilfried Claus

et al.

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Advanced deflector elements for high-throughput electron optical systems

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